Abstract:A waveguide-mode sensor detects changes in the complex refractive index on the surface of a planar waveguide chip with high sensitivity. We developed a waveguide-mode sensor chip with the Si/SiO 2 structure. It was predicted from simulations that a third layer of high refractive index added to the outermost surface of the planar waveguide may improve the sensitivity of the waveguide-mode sensor. In this research, we designed and manufactured a borosilicate glass substrate chip with a Si/SiO 2 /SiO x structure … Show more
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