Waveguide grating based SOI MOEMS accelerometer

Balasubramanian, Manushanker; Poornalakshmi, U.; Agarwal, Somya; Pattnaik, Prasant Kumar

doi:10.1109/omn.2015.7288854

Cited by 2 publications

(2 citation statements)

References 6 publications

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“…Balasubramanian M. et.al. [32] proposed and simulated the waveguide based SOI MOEMS accelerometer. The change in strain due to acceleration caused period shift of waveguide grating.…”

Section: Applications Of Moemsmentioning

confidence: 99%

Advances in Development of MOEMS Devices: A Review

Joshi¹

2019

helix

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Micro-Opto-Electro-Mechanical Systems (MOEMS) are the combination of Micro-Electro-Mechanical Systems (MEMS) merged with Micro-optics. The precision workings of MEMS, its optical functionality, and fabrication techniques make possible a broad variety of movable and tunable mirrors, filters, and other optical structures. Microoptics has new features that are widely used in many applications than the classical optics. MOEMS contain movable components that have an effect on an optical signal that is pointed towards the surface of this optical component. In this paper, the focus is on MOEMS mirrors, filters, switches and few applications. Additionally, the emphasis is on finding the important and key issues for identification of scope for further work.

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“…Balasubramanian M. et.al. [32] proposed and simulated the waveguide based SOI MOEMS accelerometer. The change in strain due to acceleration caused period shift of waveguide grating.…”

Section: Applications Of Moemsmentioning

confidence: 99%

Advances in Development of MOEMS Devices: A Review

Joshi¹

2019

helix

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“…The silicon wafer based accelerometer has silicondioxide beams and amorphous-silicon(a-Si) optical waveguide and gratings on these beams for the sensing elements. In our earlier works [45,46], we reported a simulation model of single axis accelerometer based on waveguide Bragg gratings. In this work, the design of a novel configuration of lateral quad-beam optical MEMS accelerometer for multi-axis sensitivity with suppressed cross-axis sensitivity and immunity to environmental effects is presented.…”

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confidence: 99%

Novel High-Resolution Lateral Dual-Axis Quad-Beam Optical MEMS Accelerometer Using Waveguide Bragg Gratings

Malayappan

Krishnaswamy²,

Pattnaik

2020

Photonics

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A novel lateral dual-axis a-Si/SiO2 waveguide Bragg grating based quad-beam accelerometer with high-resolution and large linear range has been presented in this paper. The sensor consists of silicon bulk micromachined proof mass suspended by silica beams. Three ridge gratings are positioned on the suspending beam and proof mass to maximize sensitivity and reduce noise. Impact of external acceleration in the sensing direction on the Bragg wavelength of gratings and MEMS structure has been modelled including the effects of strain, stress and temperature variation. Acceleration induces stress in the beam thus modifying the grating period and introducing chirp. The differential wavelength shift with respect to reference grating on the proof mass is the measure of acceleration. To compensate for the effect of the weight of the proof mass and increase the sensitivity of the sensor, electrostatic force of repulsion is applied to the proof mass. For the chosen parameters, the designed sensor has a linear response over a large range and a sensitivity of 30 pm/g. The temperature of surroundings, which acts as noise in sensor performance is compensated by taking differential wavelength shift with respect to reference grating. By design and choice of material, low cross-axis sensitivity is achieved. The proposed design enables a high-resolution well below 1 μ g/ Hz and is suitable for inertial navigation and seismometry applications.

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Waveguide grating based SOI MOEMS accelerometer

Cited by 2 publications

References 6 publications

Advances in Development of MOEMS Devices: A Review

Advances in Development of MOEMS Devices: A Review

Novel High-Resolution Lateral Dual-Axis Quad-Beam Optical MEMS Accelerometer Using Waveguide Bragg Gratings

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