2012
DOI: 10.1016/j.optcom.2011.11.045
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Waveguide effect in ZnO crystal by He+ ions implantation: Analysis of optical confinement from implant-induced lattice damage

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Cited by 7 publications
(4 citation statements)
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“…5,6) Thus, it is worthy to study the defects in ion-implanted materials by using inert elements, which have no chemical interaction with ZnO, to exclude the influence of dopants. 7,8) In this regard, Ne is selected as an appropriate implanting element owing to its inert nature and comparable ionic radius with that of Zn and some acceptor dopants such as Na.…”
mentioning
confidence: 99%
“…5,6) Thus, it is worthy to study the defects in ion-implanted materials by using inert elements, which have no chemical interaction with ZnO, to exclude the influence of dopants. 7,8) In this regard, Ne is selected as an appropriate implanting element owing to its inert nature and comparable ionic radius with that of Zn and some acceptor dopants such as Na.…”
mentioning
confidence: 99%
“…In conclusion, light restrictions are achieved, for ridge waveguides with width ranging from 20 to 40μm, with proper depth and good modal properties. Compared to previous reports on ZnO waveguides induced by ion implantation [26,27], here the energy leakage can be suppressed effectively, benefiting from proper guiding depth induced by 15 MeV C 5+ ion irradiation, showing good prospects in future applications.…”
Section: Resultsmentioning
confidence: 72%
“…A few attempts have been made in recent years to introduce the ion implantation method into the fabrication of waveguides in ZnO [26,27]. However serious mode leakage of the ion implanted ZnO waveguides existed, which limited its application in integrated systems.…”
Section: Introductionmentioning
confidence: 99%
“…In addition, ion irradiation induces refractive index changes in the near-surface region of the material through near-physical mechanisms, which makes it generally suitable for waveguide production in substrates. Light ions (e.g., hydrogen or helium ions) have been widely utilized in the preparation of waveguide structures in multiple materials [6,7]. In this case, the waveguide presents a typical barrier refractive index profile due to the lattice damage at the end of the ion range.…”
Section: Introductionmentioning
confidence: 99%