Wavefront calibration and multi-configurable measurements
Pengfei Wu,
Will Zhou,
Lucy Chu
et al.
Abstract:A single optical system with features of both automatic calibration and multiple configurations has been developed for high-resolution wavefront measurements. With the configuration of fine measurements, the tester can scan a large area to obtain mapping data with detailed local wavefront information of the sample. The tester can also take a fast snapshot of wavefront measurement by using the configuration of coarse measurements.
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