Wave mode conversion and mode transition in very high radio frequency helicon plasma

Eom, G. S.; Kim, Jung-Hee; Choe, Wonho

doi:10.1063/1.2226981

Cited by 5 publications

(1 citation statement)

References 16 publications

(25 reference statements)

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“…Yun et al have found a density rise near the LH frequency with m = 0 antennas [99]. Kim and Chang measured the ion energy distributions [100], and Eom et al [101][102][103] have generated helicons at high frequencies up to 180 MHz.…”

Section: Experiments By Othersmentioning

confidence: 99%

Helicon discharges and sources: a review

Chen

2015

Plasma Sources Sci. Technol.

197

158

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Helicon waves are waves in low-temperature, partially ionized plasmas in a dc magnetic field (B-field). The study of helicons involves both ion-neutral collisions and Larmor orbits, even when the B-field is uniform. Helicon discharges are ionized by helicon waves generated by a radiofrequency (RF) antenna. Interest in helicon discharges arose because of the high plasma densities they generate compared with other RF sources at comparable powers. The semiconductor industry has not taken advantage of this, even since the possible use of permanent magnets for the B-field has been demonstrated. Nonetheless, a large literature on helicons has evolved because of the numerous problems these discharges posed and the interesting physics found in their solutions.

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Section: Experiments By Othersmentioning

confidence: 99%

Helicon discharges and sources: a review

Chen

2015

Plasma Sources Sci. Technol.

197

158

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Effect of inhomogeneous magnetic field on plasma generation in a low magnetic field helicon discharge

Yadav

Barada²,

Ghosh

et al. 2019

Physics of Plasmas

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The ionization efficiency of helicon plasma discharge is explored by changing the low axial magnetic field gradients near the helicon antenna. The highest plasma density is found for a most possible diverging field near the antenna by keeping the other operating condition constant. Measurement of axial wave number together with estimated radial wavenumber suggests the oblique mode propagation of helicon wave along the resonance cone boundary. Propagation of helicon wave near the resonance cone angle boundary can excite electrostatic fluctuations which subsequently can deposit energy in the plasma. This process has been shown to be responsible for peaking in density in low field helicon discharges, where the helicon wave propagates at an angle with respect to the applied uniform magnetic field. The increased efficiency can be explained on the basis of multiple resonances for multimode excitation by the helicon antenna due to the availability of a broad range of magnetic field values in the near field of the antenna when a diverging magnetic field is applied in the source.

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