Water vapor permeation in amorphous/polycrystalline inorganic layers on polyethylene terephthalate substrates

Characteristics of Moisture Barrier Layer of Al2O3-Parylene Dyad Structure for Use as Solar Cell Encapsulant

“…As stated above, an Al 2 O 3 layer and a parylene layer were alternately laminated to prevent defects such as pinholes and cracks that may occur in the inorganic Al 2 O 3 layer from continuously growing and forming a moisture permeation path [12,[41][42][43]. As shown in Fig.…”

Water Vapor Permeation in Alumina Films on Polymer Substrates

“…[5] It has been demonstrated that two-layered amorphous and polycrystalline films have better barrier properties than single-layered amorphous or polycrystalline films. [6] Aluminum oxide (Al 2 O 3 ) is another promising material for barrier films. Henry et al investigated the relationship between the microstructure and the water vapor transmission rates (WVTR) of aluminum oxide deposited by magnetron sputtering on PET substrates.…”

“…[3] Of course, in addition to experiments with different chemical materials to enhance oxygen and water barrier properties, we can also improve the adhesion between the barrier coating and the polymer film of the substrate using other methods, including plasma treatment. [1][2][3][4][5][6][7][8][9][10] Plasma treatment can remove the contaminants from the polymeric substrate's surface and functionalize the polymer surface by introducing polar group such as hydroxyl (─OH) and carbonyl (─C─O). [1] Therefore, inorganic coatings like silicon and aluminum oxides can also be utilized very effectively for flexible packaging, provided that surface activation treatment is performed in advance.…”

“…[ 5 ] It has been demonstrated that two‐layered amorphous and polycrystalline films have better barrier properties than single‐layered amorphous or polycrystalline films. [ 6 ]…”