Water-soluble bio-sourced resist interactions with fluorinated etching plasmas during the photolithography process
Paule Durin,
Olha Sysova,
Alexandre Téolis
et al.
Abstract:Lithography is one of the key steps in micro/nanofabrication, which involves the use of oil-based resists, organic solvents, and toxic chemicals. Nowadays, environmental issues and regulation have raised the need for developing greener materials and processes. Therefore, efforts have been devoted to developing greener resists, in particular, resists based on water-soluble bio-sourced polymers. Among these biopolymers, polysaccharides have gained a strong interest. However, their interaction with silica etching… Show more
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