Water-jet assisted laser precision processing of Si3N4 ceramics

Yansheng, 姚燕生 Yao; Qingbo, 陈庆波 Chen; Jun, 汪俊 Wang; Xuehui, 陈雪辉 Chen; Genfu, 袁根福 Yuan

doi:10.3788/ope.20182611.2723

Cited by 4 publications

(3 citation statements)

References 0 publications

Supporting

Mentioning

Contrasting

Unclassified

Order By: Relevance

“…等)及低k材料的加工都试图利用微射流水导激光作为一种提高纵向及横向加工效果的手段. [49] 可选用大功率1064 nm的Nd:YAG激光器进行加工, 高反射率的抛光金属紫铜, 电路板铜管脚 [50] 也可以, 硅 [51] 甚至可以选择准分子激光器进行加工, 铝等高反材质金属可以选择各自不同参数的激光器进行加工 [52,53] . 由于微射流水导激光削弱了激光的峰值能量, 所以使得该技术在切割高反射率材料上加工效率的优势不明显.…”

Section: 在水射流距离喷嘴较远时相对于功率密度小的unclassified

See 1 more Smart Citation

Research and application development of compound energy field processing—laser microjet

Jiang

2020

Sci. Sin.-Phys. Mech. Astron.

View full text Add to dashboard Cite

Section: 在水射流距离喷嘴较远时相对于功率密度小的unclassified

“…. (a), (b) 4H-SiC切割横断面扫描电镜图 [48] ; (c), (d) 微射流水导激光加工硅的出入口质量图; (e), (f) Si 3 N 4 激光及水导激光加工的扫描电镜图 [49] ; (g), (h) 水导激光加工TC4金属薄板…”

Section: 在水射流距离喷嘴较远时相对于功率密度小的unclassified

Research and application development of compound energy field processing—laser microjet

Jiang

2020

Sci. Sin.-Phys. Mech. Astron.

View full text Add to dashboard Cite

“…Wang et al [ 17 ] studied the effect of nano-laser drilling on silicon nitride ceramics with different scanning intervals and found that the surface roughness of the hole cross-section increases with the increase in scanning interval. Yao et al [ 18 ] studied a solution-assisted laser processing method. The study showed that water-jet-assisted laser processing effectively reduced the energy of the laser ablation of the material.…”

Section: Introductionmentioning

confidence: 99%

Parallel Grooved Microstructure Manufacturing on the Surface of Si3N4 Ceramics by Femtosecond Laser

Wen,

Gao,

Zhang

et al. 2024

Micromachines

View full text Add to dashboard Cite

Machining special microstructures on the surface of silicon nitride ceramics helps improve their service performance. However, the high brittleness and low fracture toughness of silicon nitride ceramics make it extremely difficult to machine microstructures on their surface. In this study, a femtosecond laser is used to machine parallel grooved microstructures on the surface of silicon nitride ceramics. The effects of the laser polarization angle, laser single pulse energy, scanning line spacing, and laser scan numbers on the surface morphology and geometric characteristics of grooved microstructures are researched. It is found that a greater angle between the direction of the scanning path and laser polarization is helpful to obtain a smoother surface. As the single pulse energy increases, debris and irregular surface structures will emerge. Increasing the laser scan line spacing leads to clearer and more defined parallel grooved microstructures. The groove depth increases with the increase in the scan numbers. However, when a certain number of scans is reached, the depth will not increase further. This study serves as a valuable research foundation for the femtosecond laser processing of silicon nitride ceramic materials.

show abstract

Discrete element modeling of the machining processes of brittle materials: recent development and future prospective

Jiang

Tang

et al. 2020

Int J Adv Manuf Technol

View full text Add to dashboard Cite

In recent years, the discrete element method (DEM) has been used to model the bulk material, especially for the brittle materials (such as rocks, ceramics, concrete, ice, etc.) with various mechanical properties or responses by setting serials of contact properties (such as bonds) in the particle assembly. These bonds can withstand a certain amount of force and/or moment, so that the stresses executed in the bond can be used for determining the initiation and propagation of micro-crack. There are increasing evidences over the last twenty years that the DEM is becoming an effective numerical method to simulate the cracking, crushing and deformation of continuous media under external loads. The DEM has now been widely used in the field of processing and machining of rock, ceramic, concrete and other brittle materials. In this paper, the theoretical principles, formulations, contact models as well as the numerical solving processes of DEM are introduced. The applications of DEM for the machining processes of brittle and rigid materials such as ceramics are described and reviewed in detail, with future development trend also discussed.

show abstract

Water-jet assisted laser precision processing of Si3N4 ceramics

Cited by 4 publications

References 0 publications

Research and application development of compound energy field processing—laser microjet

Research and application development of compound energy field processing—laser microjet

Parallel Grooved Microstructure Manufacturing on the Surface of Si3N4 Ceramics by Femtosecond Laser

Discrete element modeling of the machining processes of brittle materials: recent development and future prospective

Contact Info

Product

Resources

About

Water-jet assisted laser precision processing of Si3N4 ceramics

Cited by 4 publications

References 0 publications

Research and application development of compound energy field processing&mdash;laser microjet

Research and application development of compound energy field processing&mdash;laser microjet

Parallel Grooved Microstructure Manufacturing on the Surface of Si3N4 Ceramics by Femtosecond Laser

Discrete element modeling of the machining processes of brittle materials: recent development and future prospective

Contact Info

Product

Resources

About

Research and application development of compound energy field processing—laser microjet

Research and application development of compound energy field processing—laser microjet