Wake-Up IoT Wireless Sensing Node Based on a Low-G Threshold mems Inertial Switch with Reliable Contacts

Editorial for the Special Issue on State-of-the-Art CMOS and MEMS Devices

“…Complementary Metal Oxide Semiconductor (CMOS) and Micro-Electro-Mechanical System (MEMS) devices play significant roles in emerging research fields such as artificial intelligence (AI) [ 1 ], 5G communication [ 2 , 3 ], the Internet of Things (IoT) [ 4 ], and satellite communication [ 5 , 6 ]. With the continuous development of material science and micro-fabrication processes, high-performance CMOS and MEMS devices have been the subject of extensive investigations and have advanced significantly [ 7 , 8 ].…”