2017
DOI: 10.1021/acsami.7b05468
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Wafer-Scale Synthesized MoS2/Porous Silicon Nanostructures for Efficient and Selective Ethanol Sensing at Room Temperature

Abstract: This paper presents the performance of a highly selective ethanol sensor based on MoS-functionalized porous silicon (PSi). The uniqueness of the sensor includes its method of fabrication, wafer scalability, affinity for ethanol, and high sensitivity. MoS nanoflakes (NFs) were synthesized by sulfurization of oxidized radio-frequency (RF)-sputtered Mo thin films. The MoS NFs synthesis technique is superior in comparison to other methods, because it is chip-scalable and low in cost. Interdigitated electrodes (IDE… Show more

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Cited by 58 publications
(34 citation statements)
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References 48 publications
(63 reference statements)
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“…Another porous structure was proposed by Dwivedi et al [ 73 ]. p -type silicon wafer was etched by electrochemical anodization to obtain a porous silicon substrate, on which metallic molybdenum was deposited on top by magnetron sputtering.…”
Section: Molybdenum Disulfide (Mos 2 ) Chemicalmentioning
confidence: 99%
“…Another porous structure was proposed by Dwivedi et al [ 73 ]. p -type silicon wafer was etched by electrochemical anodization to obtain a porous silicon substrate, on which metallic molybdenum was deposited on top by magnetron sputtering.…”
Section: Molybdenum Disulfide (Mos 2 ) Chemicalmentioning
confidence: 99%
“…Their application to gas sensor design, however, is rarely studied, and only focuses on pristine MXenes (Ti 3 C 2 T x , V 2 CT x , and Ti 2 CO 2 ) [14][15][16] . On the other hand, 2D transitionmetal dichalcogenides (TMDs) have been considered as promising sensing materials owing to their high surface-to-volume ratios, good adsorption properties, large number of active sites for redox reactions, and high surface reactivity 17,18 . Indeed, a significant number of literature reports have recently emerged regarding their integration into chemical sensors to detect various harmful gases, such as NH 3 , NO 2 , and VOCs 19 .…”
mentioning
confidence: 99%
“…The device demonstrated lowest limit of detection of 10 ppb with response as high as 3518% for 50 ppm NO gas at room temperature. Dwivedi et al synthesized MoS 2 /porous‐silicon heterostructure for selective detection of ethanol at room temperature with a minimum LOD of 1 ppm 264…”
Section: Efforts To Improve Performance Of Devices Based On These Matmentioning
confidence: 99%