Abstract:This paper presents a wafer-scale silicon microfabrication technology for low-cost sub-terahertz (sub-THz) waveguide device applications. Based on the effective scheme, a WR-05 (110 - 170 GHz) straight rectangular waveguide and a WR-2.8 (260 - 400 GHz) rectangular waveguide bandpass filter are implemented as demonstrated examples. The silicon deep reactive ion etching (DRIE) process is employed to etch through the total thickness of the silicon wafer and form the main waveguide channels. Then, a low-temperatur… Show more
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