Wafer-scale fabrication and growth dynamics of suspended graphene nanoribbon arrays

Suzuki, Hiroo; Kaneko, Toshiro; Shibuta, Yasushi; Ohno, Munekazu; Maekawa, Yuki; Kato, Toshiaki

doi:10.1038/ncomms11797

Cited by 47 publications

(48 citation statements)

References 54 publications

(72 reference statements)

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“…75a and b (Suzuki et al 2016). GNRs in the array were observed to have relatively uniform-edge structures with near zigzag orientation dominant.…”

Section: Synthesis Of Graphene Nanoribbons Using Pecvdmentioning

confidence: 95%

“…In the mid-2010s, NDs were formed at atmospheric pressure by microplasma processing . Recently, RF-discharge PECVD and rapid heating PECVD have made it possible to grow transition metal dichalcogenide (TMD) films at low temperatures (Ahn et al 2015) and large-scale GNR arrays (Suzuki et al 2016), respectively.…”

Section: History Of Plasma-processing Growth and Formation Of Carbon mentioning

confidence: 99%

“…The mass (Yamaguchi et al 2004) and low-cost (Sano 2004) syntheses of single-walled carbon nanohorns (SWNHs) were conducted by the methods of pulsed arc and submerged arc discharges, respectively. Furthermore, the radical injection using combined plasma (Kato and Hatakeyama 2012) 2012 Growth of suspended GNRs Rapid heating PECVD (Kato and Hatakeyama 2012) 2013 Formation of NDs at atmospheric pressure Microplasma process 2015 Low-temperature growth of TMD films RF-discharge PECVD (Ahn et al 2015) 2016 Growth of wafer-scale GNR arrays Rapid heating PECVD (Suzuki et al 2016) sources, PECVD using a water remote plasma, and PECVD using a point-arc remote plasma put the morphology-controllable growth of CNWs (Hiramatsu et al 2004), the low-temperature (450°C) growth of SWNTs (Min et al 2005), and the extremely dense growth of vertically aligned SWNTs (Zhong et al 2005) into practice, respectively. Subsequently, SWNTs were grown at atmospheric pressure (AP) by RF-discharge (RFD) PECVD in 2008 (Nozaki and Okazaki 2008).…”

Section: History Of Plasma-processing Growth and Formation Of Carbon mentioning

confidence: 99%

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Nanocarbon materials fabricated using plasmas

Hatakeyama

2017

Rev. Mod. Plasma Phys.

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Since the discovery of fullerenes more than three decades ago, new kinds of nanoscale materials of carbon allotropes called ''nanocarbons'' have so far been discovered or synthesized at successive intervals as cases such as carbon nanotubes, carbon nanohorns, graphene, carbon nanowalls, and a carbon nanobelt, while nanodiamonds were actually discovered before then. Their attractively excellent mechanical, physical, and chemical properties have driven researchers to continuously create one of the hottest frontiers in materials science and technology. While plasma states have often been involved in their discovery, on the other hand, plasma-based approaches to this exciting field originally hold promising and enormous potentials for advancing and expanding industrial/biomedical applications of nanocarbons of great diversity. This article provides an extensive overview on plasma-fabricated nanocarbon materials, where the term ''fabrication'' is defined as synthesis, functionalization, and assembly of devices to cover a wide range of issues associated with the step-by-step plasma processes. Specific attention has been paid to the comparative examination between plasma-based and non-plasma methods for fabricating the nanocarobons with an emphasis on the advantages of plasma processing, such as low-temperature/large-scale fabrication and diversitycarrying structure controllability. The review ends with current challenges and prospects including a ripple effect of the nanocarbon studies on the development of related novel nanomaterials such as transition metal dichalcogenides. It contains not only the latest progress in the field for cutting-edge scientists and engineers, but also the introductory guidance to non-specialists such as lower-class graduate students.& Rikizo Hatakeyama

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“…75a and b (Suzuki et al 2016). GNRs in the array were observed to have relatively uniform-edge structures with near zigzag orientation dominant.…”

Section: Synthesis Of Graphene Nanoribbons Using Pecvdmentioning

confidence: 95%

Section: History Of Plasma-processing Growth and Formation Of Carbon mentioning

confidence: 99%

Section: History Of Plasma-processing Growth and Formation Of Carbon mentioning

confidence: 99%

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Nanocarbon materials fabricated using plasmas

Hatakeyama

2017

Rev. Mod. Plasma Phys.

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“…Moreover, graphene nanoribbon is easy to scale up. 3,29,30 However, an experiment studying the coupling between a mechanical resonator and single-electron transistor (or quantum dot) in a graphene system is still lacking.…”

Section: Introductionmentioning

confidence: 99%

Coupling graphene nanomechanical motion to a single-electron transistor

et al. 2017

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Abstract:Graphene-based electromechanical resonators have attracted much interest recently because of the outstanding mechanical and electrical properties of graphene and their various applications. However, the coupling between mechanical motion and charge transport has not been explored in graphene. Here, we studied the mechanical properties of a suspended 50-nm-wide graphene nanoribbon, which also acts as a single-electron transistor (SET) at low temperature. Using the SET as a sensitive detector, we found that the resonance frequency could be tuned from 82 MHz to 100 MHz and the quality factor exceeded 30000. The strong charge-mechanical coupling was demonstrated by observing the SET induced ~140 kHz resonance frequency shifts and mechanical damping. We also found that the SET can enhance the nonlinearity of the resonator. Our SET-coupled graphene mechanical resonator could approach an ultra-sensitive mass resolution of ~0.55 × 10 −21 g and a force sensitivity of ~1.9 × 10 −19 N/(Hz) 1/2 , and can be further improved. These properties indicate that our device is a good platform both for fundamental physical studies and potential applications.

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“…A wider/narrower vacuum layer therefore moves the lines of |t Discussion.-It is highly feasible to experimentally realize our proposed topological phases in nanoribbon arrays, with the help of fast-growing physical and chemical processes, e.g. lithography techniques [33][34][35]. As shown schematically in Fig.…”

mentioning

confidence: 99%

Topological phase transitions in thin films by tuning multivalley boundary-state couplings

Xiao

Niu

2017

Phys. Rev. B

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Dirac boundary states on opposite boundaries can overlap and interact owing to finite size effect. We propose that in a thin film system with symmetry-unrelated valleys, valley-contrasting couplings between Dirac boundary states can be exploited to design various two-dimensional topological quantum phases. Our first-principles calculations demonstrate the mechanism in tin telluride slab and nanoribbon array, respectively, by top-down and bottom-up material designs. Both twodimensional topological crystalline insulator and quantum spin Hall insulator emerge in the same material system, which offers highly tunable quantum transport of edge channels with a set of quantized conductances.

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Wafer-scale fabrication and growth dynamics of suspended graphene nanoribbon arrays

Cited by 47 publications

References 54 publications

Nanocarbon materials fabricated using plasmas

Nanocarbon materials fabricated using plasmas

Coupling graphene nanomechanical motion to a single-electron transistor

Topological phase transitions in thin films by tuning multivalley boundary-state couplings

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