Wafer level packaging technology for silicon resonators

Baborowski, J.; Pezous, A.; Durante, G. Spinola; James, R.; Ziltener, R.; Müller, C.; Dubois, M.-A.

doi:10.1016/j.proche.2009.07.383

Cited by 9 publications

(6 citation statements)

References 4 publications

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“…The tuning fork resonators were fabricated on silicon-on-insulator (SOI) wafers. Their mode of operation and functional layout were based on resonators presented by CSEM previously [15][16] [17]. The fork tines were patterned into the device layer by deep reactive ion etching (DRIE).…”

Section: Resonator Design Fabrication and Characterizationmentioning

confidence: 99%

Evaluation of silicon tuning-fork resonators under space-relevant radiation conditions

et al. 2014

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This work reports on irradiations made on silicon bulk-acoustic wave resonators. The resonators were based on a tuning fork geometry and actuated by a piezoelectric aluminum nitride layer. They had a resonance frequency of 150 kHz and a quality factor of about 20000 under vacuum. The susceptibility of the devices to radiation induced degradation was investigated using 60 Co γ-rays and 50 MeV protons with space-relevant doses of up to 170 krad. The performance of the devices after irradiation indicated a high tolerance to both ionizing damage and displacement damage effects. The results support the efforts towards design and fabrication of highly reliable MEMS devices for space applications.

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Section: Resonator Design Fabrication and Characterizationmentioning

confidence: 99%

Evaluation of silicon tuning-fork resonators under space-relevant radiation conditions

et al. 2014

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“…[31][32][33] The fork tines were patterned into the device layer by deep reactive ion etching. Their mode of operation and functional layout were based on resonators previously presented by CSEM.…”

Section: Resonator Design Fabrication Andmentioning

confidence: 99%

Evaluation of silicon tuning fork resonators under mechanical loads and space-relevant radiation conditions

Bandi

Baborowski

Dommann

et al. 2014

J. Micro/Nanolith. MEMS MOEMS

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This work reports on mechanical tests and irradiations made on silicon bulk-acoustic wave resonators. The resonators were based on a tuning fork geometry and actuated by a piezoelectric aluminum nitride layer. They had a resonance frequency of 150 kHz and a quality factor of about 20,000 under vacuum. The susceptibility of the devices to radiation-induced degradation was investigated using 60 Co γ-rays and 50 MeV protons with space-relevant doses of up to 170 krad. The performance of the devices after irradiation indicated a high tolerance to both ionizing damage and displacement damage effects. In addition, the device characteristics were evaluated after mechanical shock and vibration tests and only small effects on the devices were observed. In all experiments, no significant changes of the resonance characteristics were observed within the experimental uncertainty, which was below 100 ppm for the resonance frequency. The results support the efforts toward design and fabrication of highly reliable MEMS devices for space applications. Downloaded From: http://nanolithography.spiedigitallibrary.org/ on 05/15/2015 Terms of Use: http://spiedl.org/terms

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“…Technologies for integration and vacuum tight and reliable packaging of these specific devices have been elaborated [50]. Recently, a novel technology for metallization of polymers (e.g.…”

Section: Miniature Sensorsmentioning

confidence: 99%

Smart skin for tactile prosthetics

Farserotu

Baborowski

Decotignie

et al. 2012

2012 6th International Symposium on Medical Information and Communication Technology (ISMICT)

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This paper provides an overview of a concept for a Smart Skin, for enabling tactile prosthetics that provide for a natural sensation of touch. The solution embeds miniature, ultra-low power, wireless sensors into the silicone coating of the prosthetic. The solution offers advantages in terms of scalability, ability to place the sensors almost anywhere, fault tolerance and potential ease of manufacturing

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Wafer level packaging technology for silicon resonators

Cited by 9 publications

References 4 publications

Evaluation of silicon tuning-fork resonators under space-relevant radiation conditions

Evaluation of silicon tuning-fork resonators under space-relevant radiation conditions

Evaluation of silicon tuning fork resonators under mechanical loads and space-relevant radiation conditions

Smart skin for tactile prosthetics

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