Abstract:As the semiconductor industry rapidly develops, wafer defect detection becomes increasingly important, given that wafers are a key raw material [1]. Wafer defects can significantly affect chip reliability and performance, and timely detection and management of these defects are crucial for improving chip yield. This paper delves into the challenges of wafer defect detection and introduces an improved YOLOv8[2] deep learning architecture: YOLOv8-AM. In this architecture, the Neck layer incorporates the AFPN (Ad… Show more
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