2016
DOI: 10.1021/acs.jpcc.6b03823
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W:Al2O3 Nanocomposite Thin Films with Tunable Optical Properties Prepared by Atomic Layer Deposition

Abstract: A systematic alteration in the optical properties of W:Al2O3 nanocomposite films is demonstrated by precisely varying the W cycle percentage (W%) from 0 to 100% in Al2O3 during atomic layer deposition. The direct and indirect band energies of the nanocomposite materials decrease from 5.2 to 4.2 eV and from 3.3 to 1.8 eV, respectively, by increasing the W% from 10 to 40. X-ray absorption spectroscopy reveals that, for W% < 50, W is present in both metallic and suboxide states, whereas, for W% ≥ 50, only metalli… Show more

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Cited by 17 publications
(5 citation statements)
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“…We measured the thicknesses of the Al 2 O 3 and AlF 3 films on Si witness coupons which were coated along with the powders using spectroscopic ellipsometry. These thicknesses were found to be 1.10 nm for the ALD Al 2 O 3 and 1.30 nm for the ALD AlF 3 , which are in accordance with the expected growth rate of 1–1.5 Å/cycle for both Al 2 O 3 and AlF 3 . However, no film growth was observed on the Si-coupons which were only dosed with TMA or HFPy, as expected.…”
Section: Resultssupporting
confidence: 86%
“…We measured the thicknesses of the Al 2 O 3 and AlF 3 films on Si witness coupons which were coated along with the powders using spectroscopic ellipsometry. These thicknesses were found to be 1.10 nm for the ALD Al 2 O 3 and 1.30 nm for the ALD AlF 3 , which are in accordance with the expected growth rate of 1–1.5 Å/cycle for both Al 2 O 3 and AlF 3 . However, no film growth was observed on the Si-coupons which were only dosed with TMA or HFPy, as expected.…”
Section: Resultssupporting
confidence: 86%
“…On the contrary, the cermet-based materials are regarded as excellent candidates for broadband absorption with simple processing methods. [6,14] Therefore, it is a promising approach to replace the nanopattern layer of the MIM structure with cermet composites, which allows the combined absorption of cermet layer and FP cavity modes. This newly constructed structure is expected to achieve spectrally selective absorption within a relatively thin absorption thickness and thus obtain an elevated local photothermal temperature.…”
Section: Introductionmentioning
confidence: 99%
“…Researchers have also demonstrated the effective use of ALD for the synthesis of doped metal oxides [39][40][41][42] and metal NPs embedded in an oxide matrix. 43,44 In this paper, we report an efficient way of preparing both noble metal (Pt) doped In2O3 thin films as well as In2O3 thin films with embedded Pt NPs, using a supercycle ALD approach. Figure 1 demonstrates the basic principle of the synthesis method.…”
Section: Introductionmentioning
confidence: 99%
“…The island growth mode in Pt ALD has been widely exploited for the synthesis of well-dispersed noble-metal nanoparticles for applications such as catalysis and gas sensing. Researchers have also demonstrated the effective use of ALD for the synthesis of doped metal oxides and metal NPs embedded in an oxide matrix. , …”
Section: Introductionmentioning
confidence: 99%