The output energy and the temporal behavior of a molecular Fg laser pumped by a coaxial electron beam have been measured in gas mixtures of He/F2 and HeiNe/F, . The highest output energy of 172 mJ has been obtained in a mixture of He/Ne/F, ( 19.9%/80%/0.1%) at a pressure of 12 bar, corresponding to a specific output energy of 10.8 J//and an intrinsic etficiency of 2.6%.Coherent light sources in the vacuum ultraviolet (VUV) are of growing interest for their applications in lithography, spectroscopy, ablation processes, biology, etc. In addition to the well-known rare-gas dimer lasers like XeT , A$, and Krf , the molecular Ff laser at 157 nm is a powerful laser source in the WV.An electron beam pumped Ff laser was demonstrated first by Rice et al. in 1977.' A specific output energy of 0.0024 J/Y was reported from a He/F2 gas mixture at a total gas pressure of 2 bar. They also showed an efficient operation at very high pumping rates at high pressures.' At a total gas pressure of 10 bar a specific output energy of 1.76 J/fwas found. In 1979, for the lirst time a discharge pumped F$ laser was described.3 In 1986 a theoretical paper on electron beam pumped Ff lasers was published by Kim et al." Recently Bastiaens et al.' showed that the small signal gain coefficients in neon-doped He/F, laser gas mixtures, pumped by a coaxial electron beam, were higher than in the normally used He/F, mixtures, probably caused by the higher pumping rate at the same gas pressures. In this letter we describe the results of measurements in which the output energy, temporal behavior, and intrinsic efficiency of such a coaxial electron beam pumped Ff laser are evaluated for neon-doped He/F2 gas mixtures.The Ff laser requires a very high pumping power. In our experiments we used a coaxial electron beam as pumping source. Details of this system have been reported elsewhere.6 The gas mixture is contained in a titanium tube of lo-mm diam and a wall thickness of 25 ,um. The diameter of the optical beam is limited to 9 mm The tube acts as an anode in a coaxial diode which is powered by a ten-stage Marx generator delivering a negative voltage pulse with a peak value of 300 kV and a width of 50 ns (FWHM). The excitation current, as measured with a Faraday cup inside the tube, has a triangular shape with a pulse width of 25 ns (FWHM).The excitation length is 25 cm. The power deposition in the laser gas mixture is measured by the pressure jump technique. At the maximum load voltage of the Marx generator the power deposition in He is 0.47 MW/ cm3/bar while in Ne a value of 1.3 MW/cm3/bar can be achieved.The first laser attempts were done in a resonator with an aluminized rear mirror as a total reflector and a MgF2 window output coupler. Unfortunately the high VUV pulse energy damaged the aluminum coating of the rear mirror. To solve this problem, a double MgFz cavity configuration, as has been investigated by Hooker et al.,' and which takes energy out of both ends, can be used.In Fig. 1 the experimental setup is shown. The resonator consists of two M...