Volume detection based on porous silicon waveguide for CO2 mid-infrared spectroscopy
Sofiane Meziani,
Abdallah Jaafar,
Abdelali Hammouti
et al.
Abstract:A mid-infrared (mid-IR) porous silicon (PSi) waveguide gas sensor was fabricated. PSi guiding and confinement layers were prepared by electrochemical anodization. Ridge waveguides were patterned using standard i-line photolithography and reactive ion etching. Due to the open pores, light and gas molecules interact in the inside volume, unlike bulk material in which the interaction takes place with the evanescent part of the light. Propagation losses are measured for a wavelength range spanning from λ = 3.9 to … Show more
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