Voltage-assisted polymer wafer bonding

Varsanik, Jonathan S.; Bernstein, J.

doi:10.1088/0960-1317/22/2/025004

Cited by 4 publications

(4 citation statements)

References 25 publications

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“…Electrostatic force is employed in various applications, such as fabric handling [ 2 , 3 , 4 ], electrostatic chuck (ESC) handling of silicon wafers [ 5 , 6 ], handling rough objects [ 7 , 8 ], levitation and transportation of silicon wafers [ 9 ] and electrostatic glass actuators [ 10 ]. Apart from this, electroadhesion is used in a complementary manner as reported in the literature, such as assisted wafer bonding [ 11 ], tuning the mechanical behavior of structural elements [ 12 ] and tuning the frictional damping behavior of structures [ 13 ]. It also finds its usage in robotic applications, such as a latching mechanism for modular robots [ 14 , 15 ] and wall climbing robots [ 16 , 17 , 18 , 19 , 20 , 21 , 22 ].…”

Section: Introductionmentioning

confidence: 99%

Experimental Investigation of the Effect of the Driving Voltage of an Electroadhesion Actuator

2014

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This paper investigates the effect of driving voltage on the attachment force of an electroadhesion actuator, as the existing literature on the saturation of the adhesive force at a higher electric field is incomplete. A new type of electroadhesion actuator using normally available materials, such as aluminum foil, PVC tape and a silicone rubber sheet used for keyboard protection, has been developed with a simple layered structure that is capable of developing adhesive force consistently. The developed actuator is subjected to the experiment for the evaluation of various test surfaces; aluminum, brick, ceramic, concrete and glass. The driving high voltage is varied in steps to determine the characteristics of the output holding force. Results show a quadratic relation between F (adhesion force) and V (driving voltage) within the 2 kV range. After this range, the F-V responses consistently show a saturation trend at high electric fields. Next, the concept of the leakage current that can occur in the dielectric material and the corona discharge through air has been introduced. Results show that the voltage level, which corresponds to the beginning of the supply current, matches well with the beginning of the force saturation. With the confirmation of this hypothesis, a working model for electroadhesion actuation is proposed. Based on the experimental results, it is proposed that such a kind of actuator can be driven within a range of optimum high voltage to remain electrically efficient. This practice is recommended for the future design, development and characterization of electroadhesion actuators for robotic applications.

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Section: Introductionmentioning

confidence: 99%

Experimental Investigation of the Effect of the Driving Voltage of an Electroadhesion Actuator

2014

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“…On the other hand, it accelerates the interface reaction, which reduces the joining temperature, the pressure, and the residual stress. Moreover, the interface reaction is easy to control, and joining time is very short [96][97][98]101].…”

Section: Electric-assisted Fieldmentioning

confidence: 99%

Joining of C_f/SiC Ceramic Matrix Composites: A Review

Zhang

et al. 2018

Advances in Materials Science and Engineering

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Carbon fiber-reinforced silicon carbide (Cf/SiC) ceramic matrix composites have promising engineering applications in many fields, and they are usually geometrically complex in shape and always need to join with other materials to form a certain engineering part. Up to date, various joining technologies of Cf/SiC composites are reported, including the joining of Cf/SiC-Cf/SiC and Cf/SiC-metal. In this paper, a systematic review of the joining of Cf/SiC composites is conducted, and the aim of this paper is to provide some reference for researchers working on this field.

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“…Microfluidic channels are etched into the CYTOP layer using a photoresist mask and an oxygen plasma etch. The coverslip is bonded to the wafer with the waveguides, plasmonic stripes, and access holes using a voltage-assisted bond procedure [47].…”

Section: Fabrication Proceduresmentioning

confidence: 99%

Integrated optic/nanofluidic fluorescent detection device with plasmonic excitation

Varsanik¹,

Bernstein²

2013

J. Micromech. Microeng.

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Integrated optic/microfluidic devices have proven to be useful tools in many sensing applications. However, the resolution and sensitivity of existing devices is limited by the processes and materials chosen for their fabrication. A procedure for the production of a new family of low-noise, high-resolution integrated microfluidic optical detection devices is presented, along with results from a prototype device. The device architecture is presented, highlighting design choices made in fluidics and optical integration to minimize scattered light. Diffused waveguides were fabricated, characterized, and modeled. A plasmonic resonator is designed, simulated, and integrated into the system to achieve electric field enhancement and localization to sub-micron dimensions. The device was tested to demonstrate both field enhancement and localization. The procedure that was developed enables the creation of integrated devices capable of high-resolution detection of fluorescent samples. The interrogation region was 200 nm long in the direction of flow, achieving sub-wavelength resolution in an integrated device. Furthermore, discrete fluorescent particles 20 nm in diameter were individually detected, demonstrating the high resolution and sensitivity capabilities of this family of devices.

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Voltage-assisted polymer wafer bonding

Cited by 4 publications

References 25 publications

Experimental Investigation of the Effect of the Driving Voltage of an Electroadhesion Actuator

Experimental Investigation of the Effect of the Driving Voltage of an Electroadhesion Actuator

Joining of C_f/SiC Ceramic Matrix Composites: A Review

Integrated optic/nanofluidic fluorescent detection device with plasmonic excitation

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Voltage-assisted polymer wafer bonding

Cited by 4 publications

References 25 publications

Experimental Investigation of the Effect of the Driving Voltage of an Electroadhesion Actuator

Experimental Investigation of the Effect of the Driving Voltage of an Electroadhesion Actuator

Joining of Cf/SiC Ceramic Matrix Composites: A Review

Integrated optic/nanofluidic fluorescent detection device with plasmonic excitation

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Product

Resources

About

Joining of C_f/SiC Ceramic Matrix Composites: A Review