2021
DOI: 10.1063/5.0025062
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Volatile or non-volatile switching? Establishing design parameters for metal-contact relays using ON/OFF hysteretic behavior (RT to 300 °C)

Abstract: This Letter presents a systematic evaluation of the adhesion force between sub-micrometer metal (molybdenum) surfaces in microelectromechanical (MEMS) relays for a range of temperatures (RT to 300 °C). As adhesion force controls whether an electrostatic actuated MEMS relay will detach or remain in contact once the power is turned-off, therefore, it is essential to know the amount of adhesion force present between the interacting electrodes. We present a theoretical scheme that allows direct extraction of the a… Show more

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Cited by 12 publications
(5 citation statements)
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“…Material with a high Young's modulus has high stiffness and offers less deflection due to stress. 1,12 This thin membrane can also be affected by temperature variations. Temperature variations impact the stress in a thin film.…”
Section: Effect Of the Stress And Temperature Variationmentioning
confidence: 99%
See 2 more Smart Citations
“…Material with a high Young's modulus has high stiffness and offers less deflection due to stress. 1,12 This thin membrane can also be affected by temperature variations. Temperature variations impact the stress in a thin film.…”
Section: Effect Of the Stress And Temperature Variationmentioning
confidence: 99%
“…This bending depends on the stiffness of the beam and Hence, on Young's modulus of the material. Material with a high Young's modulus has high stiffness and offers less deflection due to stress 1,12 …”
Section: Device Designmentioning
confidence: 99%
See 1 more Smart Citation
“…However, for the proposed phase shifter, only capacitive-ON and DC-ON states are the required states, and the OFF state is the unused state. Molybdenum is used as a switching material to provide robustness against stress and temperature variations [9]. In the S 1 state, E 1 and E 2 ends will directly contact the ground plane.…”
Section: Rf Mems Dc/capacitive Switch Designmentioning
confidence: 99%
“…Moreover, RF MEMS switches can be easily integrated into the radio frequency integrated circuits (RFICs). Various analog and digital phase shifters have been discussed in the literature [5][6][7][8][9][10][11][12][13]. Analog-type phase shifters are more affected by noise than digital phase shifters [1].…”
Section: Introductionmentioning
confidence: 99%