VLSI circuit reconstruction from mask topology

Closed form Models for Pull-In Voltage of Electrostatically Actuated Cantilever Beams and Comparative Analysis of Cantilevers and Microgripper

“…This section presents the closed form models of pullin voltage obtained from various models of capacitances available in literature [5][6][7][8][9], using the procedure explained in the above section. These capacitance models are basically parallel plate models with fringing fields.…”

“…Many attempts have been made by several authors [10][11][12][13][14][15][16][17][18][19] to derive a closed form expression for the pull-in voltage. Chowdhry et al [10] has derived closed form model for pull-in voltage calculation by considering Meji's and Fokkema's capacitance formula [5] as better capacitance model [2]. Here the investigations were done for selective dimensions of cantilever beam.…”

“…Chowdhry et al [10] has derived closed form model for pull-in voltage calculation by considering Meji's and Fokkema's capacitance formula [5] as better capacitance model [2]. Here the investigations were done for selective dimensions of cantilever beam.…”

“…But Chang's model is computationally expensive. Therefore this paper takes into consideration of all other capacitance models available in literature [5][6][7][8][9]. Based on these models pull-in voltage of cantilever beam is computed for wide range of dimensions.…”

“…But further investigation for wide range of dimension of cantilever beam shows that the closed form model used in paper [10] alone is not sufficient. Different capacitance models are available in literature [4][5][6][7][8][9] Chang's model [4] is very accurate [2]. But Chang's model is computationally expensive.…”