1993
DOI: 10.1063/1.109304
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Visualization of a gas flow instability in spin coating systems

Abstract: Flow visualization in the gas above the surface of a rotating wafer in an industrial spin coating apparatus demonstrates the presence of an Ekman-like flow instability that adversely affects the uniformity of the dried film. Experiments performed with a 6-in.-diam wafer and typical operating conditions show 6–8 spiral vortices around the wafer oriented with negative angle, as is indicative of the type II flow instability predicted by linear stability analysis. The critical Reynolds number for onset is in reaso… Show more

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Cited by 17 publications
(9 citation statements)
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“…Spin-coating technique has been introduced in colloids to fabricate thin films and colloidal crystals since long [1][2][3][4][5][6][7][8][9][10][11][12][13][14]. It is simple, reproducible and requires little material to get results in a very short time [15].…”
Section: Introductionmentioning
confidence: 99%
“…Spin-coating technique has been introduced in colloids to fabricate thin films and colloidal crystals since long [1][2][3][4][5][6][7][8][9][10][11][12][13][14]. It is simple, reproducible and requires little material to get results in a very short time [15].…”
Section: Introductionmentioning
confidence: 99%
“…While the results presented here pertain to experiments using methyl ethyl ketone (MEK) as solvent, similar results were found with acetone as solvent. This phase is characterized ( Figure 1a) by a set of von K arm an spirals 13,14 that disappear when no more suspension is pipetted into the rotating substrate. Long-range orientational order with 6-fold symmetry extending over the whole surface is observed immediately after pouring of the suspension ceased.…”
mentioning
confidence: 99%
“…Furthermore, the frequency in the low frequency band shifts considerably with increasing the orbital speed. Velocity fluctuation at low frequency is observed from the inward regions of the disk, as shown in Figure 8 et al th vortices of streamline-curvature instability are likely to travel [11]. A detailed investigation will be conducted in future work.…”
Section: Fluctuating Tangential Velocitymentioning
confidence: 92%