2016
DOI: 10.1109/tim.2016.2556898
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Visual Servoing-Based Depth-Estimation Technique for Manipulation Inside SEM

Abstract: Depth estimation for micro-nanomanipulation inside a scanning electron microscope (SEM) is always a major concern. So far in the literature, various methods have been proposed based on stereoscopic imaging. Most of them require external hardware unit or manual interaction during the process. In this paper, solely relying on image sharpness information, we present a new technique to estimate the depth in real-time. To improve the accuracy as well as the rapidity of the method, we consider that both autofocus an… Show more

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Cited by 18 publications
(11 citation statements)
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References 17 publications
(17 reference statements)
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“…Unfortunately, their method was not feasible for our system, as we could not afford to capture and analyze seven images before actually finding the peak. Similar to our proposal, Marturi, Tamadazte, Dembélé, and Piat [9] had the necessity of a moving, focused target. They managed this by moving and focusing serially.…”
Section: Related Worksupporting
confidence: 74%
“…Unfortunately, their method was not feasible for our system, as we could not afford to capture and analyze seven images before actually finding the peak. Similar to our proposal, Marturi, Tamadazte, Dembélé, and Piat [9] had the necessity of a moving, focused target. They managed this by moving and focusing serially.…”
Section: Related Worksupporting
confidence: 74%
“…The signals that derive from electron-sample interactions reveal information about the sample including external morphology (texture), chemical composition, and crystalline structure and orientation of materials making up the sample. Areas ranging from approximately 1 cm to 5 microns in width can be imaged in a scanning mode using conventional SEM techniques (magnification ranging from 20X to approximately 300000X, spatial resolution from 50 to 100 nm) [11,12]. SEM devices have at least one detector.…”
Section: Sem Setup Descriptionmentioning
confidence: 99%
“…The 3D images were generated by tilting an electron beam, followed by a stereo algorithm based on a biologically motivated energy model [ 21 ]. Otherwise, objects positioned in the Z-direction can be estimated by image sharpness [ 22 , 23 ].…”
Section: Introductionmentioning
confidence: 99%