2018
DOI: 10.1126/sciadv.aau0981
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Visible light–gated reconfigurable rotary actuation of electric nanomotors

Abstract: A widely applicable mechanism that facilely enables semicondutor micro/nanodevices with multifold mechanical reconfigurability.

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Cited by 55 publications
(55 citation statements)
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References 57 publications
(84 reference statements)
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“…More recently, a couple of techniques emerged such as maskless processes by reactive ion etching (RIE) [35] or RIE processes through the oxide native layer of silicon [58][59][60] (see Figure 1c). Moreover, a few groups employed a technique combining two existing techniques: the nanosphere lithography (NSL) and the MACE technique [61][62][63][64] (see Figure 1d for the principle scheme of this coupled technique of fabrication). [31] with permission from the Royal Society of Chemistry; (b) Si nanowires produced through an Ag-assisted chemical etching of n-Si(100) wafer (height h∼32 µm and diameter: 80 nm < D < 200 nm), reprinted with permission from [37], Copyright 2010 American Chemical Society; (c) Au/Si nanopillars (NP) obtained with the fabrication technique based on an RIE process through the oxide native layer followed by a deposition of a gold layer of 30 nm (scale bar = 5 µm, radius R∼125 nm and height h∼1000 nm); (d) principle scheme of the low-cost fabrication process combining NSL and MACE for producing AuNP-conjugated Si nanorod arrays (reprinted with permission from [63], copyright 2017 American Chemical Society).…”
Section: Fabrication Methods Of Metal-coated Si Nanosensorsmentioning
confidence: 99%
“…More recently, a couple of techniques emerged such as maskless processes by reactive ion etching (RIE) [35] or RIE processes through the oxide native layer of silicon [58][59][60] (see Figure 1c). Moreover, a few groups employed a technique combining two existing techniques: the nanosphere lithography (NSL) and the MACE technique [61][62][63][64] (see Figure 1d for the principle scheme of this coupled technique of fabrication). [31] with permission from the Royal Society of Chemistry; (b) Si nanowires produced through an Ag-assisted chemical etching of n-Si(100) wafer (height h∼32 µm and diameter: 80 nm < D < 200 nm), reprinted with permission from [37], Copyright 2010 American Chemical Society; (c) Au/Si nanopillars (NP) obtained with the fabrication technique based on an RIE process through the oxide native layer followed by a deposition of a gold layer of 30 nm (scale bar = 5 µm, radius R∼125 nm and height h∼1000 nm); (d) principle scheme of the low-cost fabrication process combining NSL and MACE for producing AuNP-conjugated Si nanorod arrays (reprinted with permission from [63], copyright 2017 American Chemical Society).…”
Section: Fabrication Methods Of Metal-coated Si Nanosensorsmentioning
confidence: 99%
“…The propulsion of micro-and nanomotors can also be provided by external energy sources, including light, [124][125][126] electric fields, [127][128][129] US, [91,[130][131][132][133][134][135][136] or magnetic fields. [137][138][139][140][141][142] One of the main advantages of externally actuated devices is the possibility to be propelled or steered in a noninvasive fashion, which could serve to guide imaging agents toward the intended region of interest with a high precision.…”
Section: Physically Poweredmentioning
confidence: 99%
“…Micro/nanomotors have aroused considerable interest in the past decade due to their potential applications in biomedical engineering [ 1 ] and environmental remediation [ 2 ]. To achieve active control and suitability for use in various environments, external stimuli including magnetic fields [ 3 ], light [ 4 , 5 ], acoustic fields [ 6 ], electric fields [ 7 ], and chemical reactions [ 8 ] are powerful tools for the precise actuation of micro/nanomotors toward the target regions in the preassigned tasks [ 9 ]. Although substantial progress has been achieved for improved self-propulsion of micro/nanomotors driven by various chemical reactions, further development of micro/nanomotors is still required to enable their industrial applications.…”
Section: Introductionmentioning
confidence: 99%