1998
DOI: 10.1063/1.120755
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Visible-blind GaN Schottky barrier detectors grown on Si(111)

Abstract: We report novel GaN detectors grown by molecular beam epitaxy on Si(111) substrates. Wurtzite structure epitaxial GaN exhibits room-temperature photoluminescence with a band-edge-related emission width as narrow as 7 nm and intensities comparable to high quality layers grown on sapphire by metalorganic chemical vapor deposition. Spectral response of lateral geometry Schottky detectors shows a sharp cutoff at 365 nm with peak responsivities of ∼0.05 A/W at 0 V, and ∼0.1 A/W with a −4 V bias. The dark current is… Show more

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Cited by 133 publications
(61 citation statements)
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“…One favored substrate has been Si ͑111͒, as this surface has a 120°symmetry which is somewhat compatible with the hexagonal III nitrides, and Si possesses obvious advantages for compatibility with integrated devices and circuits, has good thermal conductivity, and would be a low cost alternative. [16][17][18] This route is proving difficult, as the difference in lattice parameters and the strength of the Si-N bond prevent the formation of smooth, single-crystal GaN on Si ͑111͒. 18,19 To some extent this has been alleviated by using a two-step method involving various buffer layers such as SiC, 20,21 AlN, 22,23 GaAs, 24 AlAs, 25 and SiN x .…”
Section: Introductionmentioning
confidence: 99%
“…One favored substrate has been Si ͑111͒, as this surface has a 120°symmetry which is somewhat compatible with the hexagonal III nitrides, and Si possesses obvious advantages for compatibility with integrated devices and circuits, has good thermal conductivity, and would be a low cost alternative. [16][17][18] This route is proving difficult, as the difference in lattice parameters and the strength of the Si-N bond prevent the formation of smooth, single-crystal GaN on Si ͑111͒. 18,19 To some extent this has been alleviated by using a two-step method involving various buffer layers such as SiC, 20,21 AlN, 22,23 GaAs, 24 AlAs, 25 and SiN x .…”
Section: Introductionmentioning
confidence: 99%
“…As it has been shown by calculations, fianite should not react with silicon substrate to form SiO 2 , which has low dielectric constant value, at a direct contact [51]. However, in practice, it is very difficult to avoid formation of this layer at the fianite deposition or subsequent high-thermal treatment [52,53].…”
Section: Some Difficulties In Deposition Of the Fianite Layers On Silmentioning
confidence: 99%
“…That requires a change of SiO 2 over dielectrics with higher dielectric constant (high-k materials) [33][34][35]51]. The resent studies have limited possible alternatives to fianite, HfO 2 , ZrO 2 and its silicates.…”
Section: Fianite In Photonics 161mentioning
confidence: 99%
“…However, due to the even larger differences in lattice constant and thermal expansion coefficients between the III-nitrides and silicon as compared with sapphire, it is really difficult to grow high quality epitaxial layers of GaN-based nitrides on a silicon substrate. A lot of attempts have been made to grow III-nitrides on silicon substrates in the past decade using various kinds of materials as intermediate layer, such as AlN [1,2], carbonized silicon [3], nitridized GaAs [4], oxidized AlAs [5], and g-Al 2 O 3 [6]. In particular, by using a thin AlN film as intermediate layer, ultraviolet and violet-light emitting diodes of III-nitride have been fabricated on silicon substrate by molecular beam epitaxy (MBE) [1].…”
Section: Introductionmentioning
confidence: 99%