2015
DOI: 10.1039/c5lc00661a
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Viscosity measurement based on the tapping-induced free vibration of sessile droplets using MEMS-based piezoresistive cantilevers

Abstract: We report a simple technique to measure the free vibration of microlitre-sized droplets using an array of thirteen MEMS-based piezoresistive cantilevers and demonstrate its application for the measurement of viscosity. Because the damping of the free vibration of a liquid droplet is known to be affected by the viscosity of the liquid, measuring the vibration of a droplet allows the viscosity to be estimated from a dilute sample volume. However, conventional methods to measure the droplet vibration require soph… Show more

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Cited by 44 publications
(38 citation statements)
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“…Among various technologies utilized in mechanical sensors, the piezoresistive effect has several advantages, such as device miniaturization, low power consumption, and simple read out circuits7891011. The piezoresistance of silicon (Si) has been deployed in a large number of applications, including inertia12, pressure13, tactile14, and chemical/bio sensors1516 owing to its large gauge factor, worldwide availability and mature fabrication technologies. However, Si is not a suitable material used in harsh environments because of its relatively low energy gap of 1.12 eV and its plastic deformation at high temperature17.…”
mentioning
confidence: 99%
“…Among various technologies utilized in mechanical sensors, the piezoresistive effect has several advantages, such as device miniaturization, low power consumption, and simple read out circuits7891011. The piezoresistance of silicon (Si) has been deployed in a large number of applications, including inertia12, pressure13, tactile14, and chemical/bio sensors1516 owing to its large gauge factor, worldwide availability and mature fabrication technologies. However, Si is not a suitable material used in harsh environments because of its relatively low energy gap of 1.12 eV and its plastic deformation at high temperature17.…”
mentioning
confidence: 99%
“…The sensing principle of the cantilever was based on the piezoresistive effect: The resistance of the cantilever changes when it bends. The fabrication process for the cantilever used in our device is reported elsewhere [22][23][24][25][26]. A scanning electron microscope (SEM) image of the fabricated cantilever is shown in Figure 2a.…”
Section: Methodsmentioning
confidence: 99%
“…The constant a could perhaps be dependent on the drop size and properties as well as the wetting conditions since the energy variations were apparently related to the oscillatory behaviour of the drop. 48,49 We rationalise the underlying mechanism of drop motion and its spontaneity by calculating energy diagrams and summarizing them in four representative moments for each case studied. Fig.…”
Section: Energy Analysismentioning
confidence: 99%