2H-TaSe 2 is a model transition metal dichalcogenide material that develops charge density waves (CDWs). Here we present variable-temperature Raman spectroscopy study on both incommensurate charge density waves (ICDW) and optical phonon modes of 2H-TaSe 2 thin layers exfoliated onto SiO 2 substrate. Raman scattering intensities of all modes reach a maximum when the sample thickness is about 11 nm. This phenomenon can be explained by optical interference effect between the sample and the substrate. The E 2g ICDW amplitude modes experience redshift as temperature increases. We extract ICDW transition temperature (T ICDW ) from temperature dependence of the frequency of E 2g ICDW mode. We find that T ICDW increases in thinner flakes, which could be due to a result of significantly enhanced electron-phonon interactions. Our results open up a new window for search and control of CDW of twodimensional matter. TaSe 2 single crystals used in this work were purchased from 2D Semiconductors Company.Ultrathin layers were exfoliated onto Si substrates with 80 nm SiO 2 by the standard "Scotch-tape" method. 15 Thicknesses of exfoliated TaSe 2 ultrathin layers were determined by atomic force microscopy (AFM). A representative AFM image and height profile are shown in Fig. 1b.Raman scattering was conducted on freshly cleaved samples that were mounted in a cryostat with a window for optical access. A Helium-Neon laser at 632.8 nm was used, and the laser power was kept below 0.2 mW to avoid heating effect. Two ultra-narrow band notch filters were used to suppress the Rayleigh scattered light. The scattered light was dispersed by a Horiba iHR550 spectrometer and detected by a liquid nitrogen cooled CCD detector. Temperature of the TaSe 2 samples was estimated by the ratio of Stokes and anti-Stokes Raman scattering intensities. 14,16,17 Variable temperature Raman spectra for each sample were taken during the warming process from ~10 to ~300 K. The A 1g , E 1g , and E 2g modes are Raman active. 3 In the low-temperature CCDW phase, a superlattice of 3a 0 ×3a 0 ×c 0 is formed. 18 The commensurate superlattice shown schematically in Moncton revealed the Kohn anomaly of the Ʃ 1 -symmetric LA-phonon branch on the Ʃ line by neutron scattering. 18,19 In 2H structure, the LA branch is degenerate with the Ʃ 1 rigid-layer mode in the largest part of the Ʃ line. The 12 Ʃ 1 modes reduced to 2A 1g + 2E 2g + 2B 1u +2E 2u modes in the CCDW phase and the two K 6 (E 2 ) modes, where Ta atoms are displaced in the basal plane, reduced to 2E 2g + 2E 1u . Fig. 2a shows Raman spectra of TaSe 2 flakes with different thicknesses at around 10 K, which is well below the T CCDW . These samples were exfoliated on the same Si wafer and measured under the same condition. To explore intrinsic CDW properties of real twodimensional 2H-TaSe 2 , high quality samples with thickness reaching the monolayer limit are necessary. The 1-nm-thick sample is the thinnest we have obtained so far. However, In the case of the 2-nm-thick sample, no Raman peaks are observ...