Vibrational excitation and negative-ion production in magnetic multicusp hydrogen discharges

Modeling of N<tex>$_2$</tex>–H<tex>$_2$</tex>Capacitively Coupled Plasma for Low-k Material Etching

“…3. The H density profiles in the figure with vibrational states shows a similar trend with other calculation results [21].…”

“…For the excitation to lower excited states , the former process is effective. On the contrary, the latter process is effective for the excitation to higher excited states [21]. The higher vibrational states are well known as the main source of hydrogen negative ions [22].…”

Vibrational kinetics, electron dynamics and elementary processes in H2and D2plasmas for negative ion production: modelling aspects

“…So we can see the electron peak located at about 110 eV, followed by the long plateau caused by ionization and inelastic losses ending with the low energy bulk electrons, that represent the electrons at the final stage of their energy degradation. Note that the smooth plateau extending from 20 to 100 eV is due to electron-electron collisions that contribute to fill the depressions between maxima arising from ionizing and inelastic collisions [6], [9], [10]. , N v (c), Ddensity (d)) in the D 2 postdischarge regime (see text).…”

Hybrid simulation of a dc-enhanced radio-frequency capacitive discharge in hydrogen

“…From the modelling and simulation standpoints, discharges in H 2 or its mixtures with other gases have been studied extensively. Early work focused on the development of plasma chemistry models [12][13][14][15][16][17][18][19][20][21][22][23][24][25][26]. Although most of these works assumed a spatially uniform plasma, they provided a detailed description of the vibrational distribution by coupling the two-term Boltzmann equation for the EEDF to a 'master' equation for the vibrational distribution function (VDF), and sometimes the population of electronically excited states of molecular species.…”