Abstract:There have been a number of studies on the Plateau–Rayleigh instability and the influence of the initial jet perturbation on the jet breakup. Our study observed that the threshold lengths of jet breakup varied with the voltage applied to the piezoelectric sheets during the droplet generation for extreme-ultraviolet (EUV) source and wafer cleaning. Combining acoustics and fluid mechanics, we investigated the process and mechanism to interpret the impact of the horn vibration on the jet breakup. The whole proces… Show more
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