2004
DOI: 10.1016/j.sna.2004.04.023
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Vibration measurement with a micromachined mirror in a very-short external cavity laser

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Cited by 10 publications
(9 citation statements)
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“…Then  F (t) can be figured up by calculating the inverse function of g(t) according to equation (2). Thereafter, we calculate the spectrum of  F (t), that is  F (f).…”
Section: In Frequency Domainmentioning
confidence: 99%
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“…Then  F (t) can be figured up by calculating the inverse function of g(t) according to equation (2). Thereafter, we calculate the spectrum of  F (t), that is  F (f).…”
Section: In Frequency Domainmentioning
confidence: 99%
“…(1), (2), (3), and import the data to the hardware models presented in section III above to verify the C value solved by the modules whether equals to the preset C value.…”
Section: Simulations and Analysismentioning
confidence: 99%
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“…If the mirror is suspended, its displacement is induced by acceleration or vibration of the mirror frame, allowing to measure it with very high accuracy. We have tried to propose a compact version of the system using a micromachined mirror in a very-short external cavity configuration (Chollet et al 2004). Actually, we showed that using an external cavity length below 10 µm is increasing the packaging tolerance.…”
Section: Vibration/acceleration Sensor With Very-short External Cavitmentioning
confidence: 99%
“…Accordingly, we have designed two different versions of the micro-mirror with integrated actuator that allows fixing roughly the cavity length by using mechanical contact between bumps on the mirror and the laser chip, and fine tuning by applying a voltage to the actuator. The earlier version was based on surface micromachining technique (Chollet et al 2004), but more recently we used a DRIE etched mirror with improved manufactureability (cf. figure 5) that was packaged with a laser diode.…”
Section: Vibration/acceleration Sensor With Very-short External Cavitmentioning
confidence: 99%