Vibration Analysis and Control of AFM Microcantilever Based on the MCS Theory Using the FSMC Control in the Air

Korayem, Moharam Habibnejad; Ghasemi, Pouya

doi:10.1007/s13369-019-03820-y

Cited by 6 publications

(4 citation statements)

References 22 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The microbeam is made of Si alloy integrated with another layer composed of a piezoelectric core layer made of ZnO enclosed by two electrodes made of Au. The base beam, piezoelectric layer, and electrode elasticity modulus and the mass density are, respectively, 105 (GPa), 2330 (kg/m3), 104 (GPa), 6390 (kg/m3) and 78 (GPa), 19,300 (kg/m3) (Korayem et al, 2019; Mahmoodi and Jalili, 2007). To adjust the current formulation which is developed for microplates, on a microbeam, the dependency of the governing equations on the width coordinate, that is y, is ignored.…”

Section: Resultsmentioning

confidence: 99%

“…Kahrobaiyan et al (2010) examined the natural frequency and the sensitivity of an atomic force microscope (AFM) microcantilever (MC) on the basis of the modified couple stress theory (MCST) along with the Euler–Bernoulli beam assumptions. Korayem et al (2019) analyzed experimentally and theoretically the control of the vibration amplitude of a piezoelectric AFM MC modeled on the basis of the Timoshenko beam theory besides the MCST assumptions. Ahmadi et al (2019) studied the vibrational characteristics of piezoelectric AFM MCs regarding the nonlinear interaction between the MC tip and the sample using Abaqus package beside Python scripting.…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Vibration and thermal buckling analyses of three-layered centrosymmetric piezoelectric microplates based on the modified consistent couple stress theory

Abbaspour

Arvin

2020

Journal of Vibration and Control

View full text Add to dashboard Cite

In this study, free and forced vibration investigations and thermal buckling analysis of three-layered centrosymmetric piezoelectric microplates are examined. To model the size effects, the size-dependent consistent couple stress theory is used. To be compatible with the modified coupled stress theory, a modification is proposed to apply to the consistent couple stress theory. Resorting to the Navier’s approach, the governing equations are treated in the case of simply supported boundary conditions to extract the free and forced vibration outcomes and the thermal buckling numerical results. The verifications demonstrate the effectiveness of the proposed modification. The effects of the material length scale parameter and the flexoelectricity coefficient on the findings are investigated. Moreover, the closed- and open-circuit condition impacts on the free and forced vibration and the thermal buckling analyses are studied.

show abstract

Section: Resultsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Vibration and thermal buckling analyses of three-layered centrosymmetric piezoelectric microplates based on the modified consistent couple stress theory

Abbaspour

Arvin

2020

Journal of Vibration and Control

View full text Add to dashboard Cite

show abstract

“…When the MC oscillates near the surface, the piezo is turned off and using the model for the base, its acceleration is calculated and the control is achieved by means of the base. The dynamic equations for base modeling are expressed (A. H. Korayem et al, 2019).…”

Section: The MC Frequency and Time Response In The Liquid Mediummentioning

confidence: 99%

“…Korayem et al studied the AFM dynamic response in the liquid environment based on the string of spheres model (Alireza Habibnejad Korayem, Korayem, & Ghaderi, 2015). Korayem and Ghasemi controlled four layer MC by using the FSMC method in the air environment (A. H. Korayem, Ghasemi, & Korayem, 2019). Ragazzon designed a state observer to investigate the surface topography in the noncontact mode (Ragazzon, Gravdahl, Pettersen, & Eielsen, 2015).…”

Section: Introductionmentioning

confidence: 99%

The effect of liquid medium on vibration and control of the AFM piezoelectric microcantilever

Ghasemi

Korayem

2020

Microscopy Res & Technique

View full text Add to dashboard Cite

This article investigates the vibration motion and control of the piezoelectric microcantilever (MC) of the atomic force microscope in the amplitude mode in a liquid environment for both free and forced vibrations. The modeled MC includes two electrode layers, a piezoelectric layer, and the geometric discontinuities as a result of these layers and the change in the MC cross section at the probe-MC contact point is modeled. The equations of motion are derived using Hamilton's principle and then discretized with the aid of the finite element method. The system frequency and time response in the free vibration mode when placed in a liquid medium are compared with experimental results. Also, the sample surface topography in the noncontact mode, when passing through the surface roughness, has been modeled as rectangular and wedge-shaped. Furthermore, the control of piezoelectric MC in two cases of near and far from the sample surface is examined. In the case of far from the surface, the system is controlled using the piezoelectric layer installed on the beam, whereas in the case of near the surface, the piezo is turned off due to the existence of nonlinear forces such as Van der Waals and Derjaguin, Muller, and Toporov contact forces and the control is achieved through the base excitation. For system control modeling, the robust fuzzy sliding mode control (FSMC) approach is utilized and the results are compared with those of the simple sliding mode control (SMC) as well as proportional, integral, and derivative control. The presented FSMC approach can remarkably reduce the chattering phenomenon at the SMC input in the liquid medium and accordingly improve the results compared to the other two methods.

show abstract

Cantilever multi-axis control method for a new arm picking robot

Zhang¹,

Yu²

2021

Int J Syst Assur Eng Manag

View full text Add to dashboard Cite

Vibration Analysis and Control of AFM Microcantilever Based on the MCS Theory Using the FSMC Control in the Air

Cited by 6 publications

References 22 publications

Vibration and thermal buckling analyses of three-layered centrosymmetric piezoelectric microplates based on the modified consistent couple stress theory

Vibration and thermal buckling analyses of three-layered centrosymmetric piezoelectric microplates based on the modified consistent couple stress theory

The effect of liquid medium on vibration and control of the AFM piezoelectric microcantilever

Cantilever multi-axis control method for a new arm picking robot

Contact Info

Product

Resources

About