“…Various radio frequency (RF) switches, such as field effective transistor (FET), ferrite-based switches, PIN diodes, lumped elements, loaded lines, and micro-electro-mechanical system (MEMS) switches, are used to achieve phase-shifting. RF MEMS switches offer low loss, low up-state capacitance, high linearity, and lower power consumption than other RF switches [1][2][3][4]. Moreover, RF MEMS switches can be easily integrated into the radio frequency integrated circuits (RFICs).…”