1997
DOI: 10.1049/el:19970841
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Very low loss multimode polymeric optical waveguides

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Cited by 25 publications
(8 citation statements)
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“…4,5 Among the several techniques that can be applied to fabricate polymeric optical waveguide, dry etching method such as reactive ion etching (RIE) is often used because these techniques can offer excellent etching profile. [6][7][8] It has been thought that one of the disadvantages of this technique is its complicated process. Furthermore, this technique is not suitable to define large core dimensions (~ several 100 μm), which may be needed for optical applications such as interconnections.…”
Section: Introductionmentioning
confidence: 99%
“…4,5 Among the several techniques that can be applied to fabricate polymeric optical waveguide, dry etching method such as reactive ion etching (RIE) is often used because these techniques can offer excellent etching profile. [6][7][8] It has been thought that one of the disadvantages of this technique is its complicated process. Furthermore, this technique is not suitable to define large core dimensions (~ several 100 μm), which may be needed for optical applications such as interconnections.…”
Section: Introductionmentioning
confidence: 99%
“…Several techniques can be applied to fabricate polymeric waveguides. [3][4][5] Among them, dry etching methods such as a reactive ion etching (RIE) and an inductively coupled plasma (ICP) are often used because this technique can offer the excellent etching profile. 6 One of the disadvantage of this technique is its complicated process, and thus, not cost effective for mass production.…”
Section: Introductionmentioning
confidence: 99%
“…Film carriers controlling the characteristic impedance have been developed for optical transmission modules operating at several tens of gigahertz, since they have high-frequency transmission capability [4]. More recently, high-density optical guided wave films with high degrees of freedom in interconnection layout have been developed as interconnection media between the optical devices [5].…”
Section: Introductionmentioning
confidence: 99%