1998
DOI: 10.1038/29206
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Very long carbon nanotubes

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Cited by 353 publications
(120 citation statements)
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“…CVD is ideally suited to growing aligned CNTs on desired substrates for specific applications, which is not feasible by arc or laser methods. Li et al 86 have grown dense MWNT arrays on Feimpregnated mesoporous silica prepared by a sol-gel process, terrones et al 87 have produced CNTs on co-coated quartz substrates via CVD of a triazene compound with nearly no byproducts, while Pan et al 88 have reported the growth of aligned CNTs of more than 2 mm in length over mesoporous substrates from acetylene. Highly aligned nanotubes for electronics have been grown from acetylene 89 using a Co catalyst impregnated in alumina nanochannels at 650°C, while pillars of parallel CNTs have been grown from ethylene on Fe-patterned Si plates at 700°C for field emission applications.…”
Section: Chemical Vapor Depositionmentioning
confidence: 99%
“…CVD is ideally suited to growing aligned CNTs on desired substrates for specific applications, which is not feasible by arc or laser methods. Li et al 86 have grown dense MWNT arrays on Feimpregnated mesoporous silica prepared by a sol-gel process, terrones et al 87 have produced CNTs on co-coated quartz substrates via CVD of a triazene compound with nearly no byproducts, while Pan et al 88 have reported the growth of aligned CNTs of more than 2 mm in length over mesoporous substrates from acetylene. Highly aligned nanotubes for electronics have been grown from acetylene 89 using a Co catalyst impregnated in alumina nanochannels at 650°C, while pillars of parallel CNTs have been grown from ethylene on Fe-patterned Si plates at 700°C for field emission applications.…”
Section: Chemical Vapor Depositionmentioning
confidence: 99%
“…In order to obtain good performance, such as device effects and electrical conductivity, direct growth on metal substrates had also been reported [10][11][12], in which the highly oriented CNTs array was grown by microwave plasma chemical vapor deposition (MPCVD) or plasma enhanced chemical vapor deposition (PECVD) [13]; the directional growth of CNTs was guided by the electric field bias of the plasma [14], but the growth effect was inferior to that of silicon substrate. In addition, in the area of growth of long CNTs on silicon substrate, many research teams had done a lot of work to continuously improve the height and quality of CNTs array [11][12][13][14][15][16][17]. In this paper, first, CNTs array with higher quality are synthesized directly on the silicon substrate by using the chemical vapor deposition (CVD) tube furnace.…”
Section: Introductionmentioning
confidence: 99%
“…For their synthesis, arc discharge (Iijima, 1991), laser ablation (Thess et al, 1996), and chemical vapor deposition (CVD) (Pan et al, 1998;Ren et al, 1998;Tanemura et al, 2001) have conventionally been employed. In those methods, however, growth temperatures higher than 500 o C are generally required.…”
Section: Introductionmentioning
confidence: 99%