1994
DOI: 10.1143/jjap.33.4226
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Very Long and Large-Area RF Plasma Productions by Odd Surface Waves for Online Mass Production of Amorphous Silicon Solar Cells or Mirrors

Abstract: There exist several classes of theories beyond the Standard Model which contain massive spin-1 color octets, generically called "colorons". Indeed we argue that colorons inevitably appear in the spectrum whenever new colored particles feel an additional confining force. Colorons are distinctive at hadron colliders as this is the only environment in which they can be resonantly produced. In the simplest models we show that the coloron naturally decays to multijets via secondary resonances, which can be consiste… Show more

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Cited by 17 publications
(4 citation statements)
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“…Their utilization for plasma production and especially for solids processing has many advantages as compared with the case of bulk modes. Japanese scientists (Nonaka 1994, see also references therein) have had good experience of large-area plain semiconductor processing with the aid of microwave gas discharges sustained by surface waves. On the other hand, the possible propagation of the SCOMs along the plasma interface in a fusion device can lead to undesirable heating of this region of the confined plasma.…”
Section: Discussion Of the Possible Application Of The Scomsmentioning
confidence: 99%
See 1 more Smart Citation
“…Their utilization for plasma production and especially for solids processing has many advantages as compared with the case of bulk modes. Japanese scientists (Nonaka 1994, see also references therein) have had good experience of large-area plain semiconductor processing with the aid of microwave gas discharges sustained by surface waves. On the other hand, the possible propagation of the SCOMs along the plasma interface in a fusion device can lead to undesirable heating of this region of the confined plasma.…”
Section: Discussion Of the Possible Application Of The Scomsmentioning
confidence: 99%
“…This is connected with their numerous technological applications. For instance, RF and microwave gas discharges produced and sustained by surface modes can be useful for semiconductor processing, plasma production, pumping laser media, etc (Ferreira and Moisan 1993, Zhelyazkov and Atanasov 1995, Nonaka 1994, Moisan and Pelletier 1992. Ion cyclotron resonance heating (ICRH) and electron cyclotron resonance heating (see, e.g., Becoulet 1996 andLaqua 1999, respectively, and also references therein) are also well known to be widely used methods for additional heating of magnetically-confined fusion plasmas.…”
Section: Introductionmentioning
confidence: 99%
“…The application-orientated research on TWSDs led to introducing changes of the shape of the discharge vessels aiming at reaching large area discharge production [166,167] as well as to inventing new types of launchers for planar discharges [168][169][170][171][172][173][174][175][176][177][178][179][180][181][182][183] and short tubular discharges [184][185][186][187][188][189][190][191][192] and also new launchers for discharge production in the microwave range [193]. Many possibilities for the use of TWSDs for surface processing and film deposition [12,149,[194][195][196][197][198][199][200][201][202][203][204][205][206][207][208][209]…”
Section: Travelling Wave-sustained Discharges: Brief History and Topimentioning
confidence: 99%
“…However, almost all studies are concerned with long (sometimes extremely long [9]) plasma columns, such that the plasma diameter D is much less than the column length L. Such high-density plasma columns are clean, quiescent and reproducible, but not suitable for the recent trend of large-diameter plasma processing. Therefore some new antenna structures have been developed to obtain a large-aperture surface-wave plasma of D>L [10][11][12][13][14][15][16][17][18][19][20][21][22][23][24][25][26][27].…”
Section: Introductionmentioning
confidence: 99%