Very Large Area EDS Spectral Images: Impact of Latest Silicon Drift Detector Technology

Long Element Profile of Layered Coastal Sediments by SEM/EDS

“…Historically, SEM/EDS has been used to analyze a single field of view at relatively low count rates [1]. In recent years, advances in all aspects of instrumentation (SEM automated sample stages, SDD sensitivity and count rate, SEM and analyzer networking, computer speed, pulse processor speed and mass storage capacity) have improved such that collecting large area maps has become practical [2,3].…”