Vertical Nanoscale Vacuum Channel Triodes Based on the Material System of Vacuum Electronics

Abstract

Nanoscale vacuum channel triodes realize the vacuum-like transmission of electrons in the atmosphere because the transmission distance is less than the mean free path of electrons in air. This new hybrid device is the deep integration of vacuum electronics technology, micro-nano electronics technology, and optoelectronic technology. It has the advantages of both vacuum and solid-state devices and is considered to be the next generation of vacuum electronic devices. In this work, vertical nanoscale vacuum channel diodes and triodes with edge emission were fabricated using advanced micro-nano processing technology. The device materials were all based on the vacuum electronics material system. The field emission characteristics of the devices were investigated. The diode continued emitting at a bias voltage from 0 to 50 V without failure, and the current variation under different vacuum degrees was better than 2.1%. The field emission characteristics of the devices were evaluated over a wide pressure range of between 10−7 Pa and 105 Pa, and the results could explain the vacuum-like behavior of the devices when operating in air. The current variation of the triode is better than 6.1% at Vg = 8 V and Va = 10 V.

Tungsten–SiO2–Based Planar Field Emission Microtriodes with Different Electrode Topologies

“…The analysis also showed that in the case of the FIB microtriodes, The local electric field strength near the cathode can be estimated using Equation (2), where the electric field strength is the product of the applied voltage and the field enhancement factor. The latter is inversely proportional to the slope according to Equation (5). The Fowler-Nordheim plots in Figures 7b and 9b show that the slope for the PL microtriode and the FIB microtriode was 300.2 and 26.3, respectively.…”

“…Advances in micro-and nanotechnology have led to a renewed interest in vacuum electronics [1][2][3][4][5]. Vacuum electronic devices have several advantages over semiconductor devices, making them the preferred choice for some applications.…”

Magnetically locked Janus particle clusters with orientation-dependent motion in AC electric fields

“…When a uniform AC field in the kHz frequency range is applied to a metallodielectric Janus particle within a liquid, the particle reorients such that the interface between the hemispheres aligns parallel with the field due to dielectrophoresis (DEP), yielding the greatest possible induced dipole moment. 46,47 After this reorientation, ions in solution accumulate preferentially at the surface of the metallic hemisphere, generating an induced charge cloud. At steady state, due to this induced charge cloud, fluid is drawn to the particle parallel to the field and ejected perpendicular to the field, away from the two hemispheres.…”