Vertical mirrors fabricated by deep reactive ion etching for fiber-optic switching applications

Marxer, C.; Thio, C. L.; Grétillat, M.-A.; Rooij, N. F. de; Battig, R.; Anthamatten, O.; Valk, B.; Vogel, Peter

doi:10.1109/84.623118

Cited by 154 publications

(90 citation statements)

References 17 publications

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“…The calculated results were summarized in Table 1. The maximum scattering light was below 0.5%, when a He-Ne laser (λ = 632.8 nm) was applied into the perpendicular direction on the mirror plate (θ = 0°) [10].…”

Section: Measurements and Resultsmentioning

confidence: 99%

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Piezo-electrically Actuated Micro Corner Cube Retroreflector (CCR) for Free-space Optical Communication Applications

Lee¹,

Park²

2010

Journal of Electrical Engineering and Technology

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-In this paper, an extremely low voltage operated micro corner cube retroreflector (CCR) was fabricated for free-space optical communication applications by using bulk silicon micromachining technologies. The CCR was comprised of an orthogonal vertical mirror and a horizontal actuated mirror. For low voltage operation, the horizontal actuated mirror was designed with two PZT cantilever actuators, torsional bars, hinges, and a mirror plate with a size of 400 ㎛ × 400 ㎛. In particular, the torsional bars and hinges were carefully simulated and designed to secure the flatness of the mirror plate by using a finite element method (FEM) simulator. The measured tilting angle was approximately 2º at the applied voltage of 5 V. An orthogonal vertical mirror with an extremely smooth surface texture was fabricated using KOH wet etching and a double-SOI (silicon-on-insulator) wafer with a (110) silicon wafer. The fabricated orthogonal vertical mirror was comprised of four pairs of two mutually orthogonal flat mirrors with 400 ㎛ (length) × 400 ㎛ (height) × 30 ㎛ (thickness). The cross angles and surface roughness of the orthogonal vertical mirror were orthogonal, almost 90° and 3.523 nm rms, respectively. The proposed CCR was completed by combining the orthogonal vertical and horizontal actuated mirrors. Data transmission and modulation at a frequency of 10 Hz was successfully demonstrated using the fabricated CCR at a distance of approximately 50 cm.

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Section: Measurements and Resultsmentioning

confidence: 99%

“…To overcome these obstacles, passive reflective systems have been developed for wireless sensor nodes [5]- [10]. Although these sensor nodes did not have light sources, they transmitted data only by reflecting external light using reflectors.…”

Section: Introductionmentioning

confidence: 99%

Piezo-electrically Actuated Micro Corner Cube Retroreflector (CCR) for Free-space Optical Communication Applications

Lee¹,

Park²

2010

Journal of Electrical Engineering and Technology

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“…The roughness of DRIE fabricated vertical sidewalls is normally on the order of several tens of nanometer [65], this greatly degrades the optical reflectivity of this surface. To improve the reflectivity, an aluminum layer can be evaporated on the vertical surface [65].…”

Section: Dry Etchingmentioning

confidence: 99%

“…To improve the reflectivity, an aluminum layer can be evaporated on the vertical surface [65]. Of course, for ultrasonic transducer application, this roughness is of no importance.…”

Section: Dry Etchingmentioning

confidence: 99%