“…Since that time a continuous increase in the aspect ratio has been observed. This trend is based on the requirements of numerous manufacturing applications, for example X-ray gratings (Reznikova et al, 2008), gas chromatography columns (Bhushan et al, 2007), micro-capillary filters (Kondo et al, 2010), magnetic coils (Turner et al, 1996), X-ray telescopes (Ezoe et al, 2010), micro-gears (Meyer et al, 2008), micro-capacitors with high AR cantilever (Haluzan et al, 2008), etc. To this end, the sidewalls in the technological layer of so called resist should be close to vertical.…”