2023
DOI: 10.1038/s41586-022-05612-1
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Vertical full-colour micro-LEDs via 2D materials-based layer transfer

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Cited by 124 publications
(75 citation statements)
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“…This process is no longer remote epitaxy but a special kind of epitaxial lateral overgrowth (ELOG) (41). As previously reported (17,25,(42)(43)(44)(45), remote epitaxy is a promising method for fabricating transferable III-nitride films and light-emitting devices. Remote epitaxy of single-crystal GaN(0001) films on graphene/GaN(0001) templates has been reported at a growth temperature of ~700°C by MBE (18,24).…”
Section: Discussionmentioning
confidence: 79%
“…This process is no longer remote epitaxy but a special kind of epitaxial lateral overgrowth (ELOG) (41). As previously reported (17,25,(42)(43)(44)(45), remote epitaxy is a promising method for fabricating transferable III-nitride films and light-emitting devices. Remote epitaxy of single-crystal GaN(0001) films on graphene/GaN(0001) templates has been reported at a growth temperature of ~700°C by MBE (18,24).…”
Section: Discussionmentioning
confidence: 79%
“…The negligible EL emission beyond the edges of the source contact can be attributed to highly localized band bending directly above the electrode. The ability to spatially localize EL simply via electrode patterning suggests that these MS-MoS 2 vertical MSIM devices can be used as pixels in miniaturized light sources such as micro light emitting diodes (micro-LEDs) …”
Section: Resultsmentioning
confidence: 99%
“…Recently, remote epitaxy has proven significant advantages, including the facile transferability of the vdW epitaxy and the capability to produce freestanding single-crystalline nanomembranes. For instance, III-V thin-films produced from remote epitaxy can be handled by 2DLT to realize diverse photonic devices [ 7 , 42 , 88 94 ] for photonic integrated circuits and exploring nanophotonic physics [ 95 100 ]. Figure 4 h displays the cross-sectional SEM image and the light-emitting images of flexible AlGaAs LED [ 90 ].…”
Section: Applicationsmentioning
confidence: 99%
“…To overcome these limitations, remote and van der Waals (vdW) epitaxy technologies have been proposed as a growth method together with a new layer transfer technique called 2D material-assisted layer transfer (2DLT) [ 7 ]. Massive researches have been reported based on this technique.…”
Section: Introductionmentioning
confidence: 99%