Versatile function of nanostructured-ZnO sensors using photo-assisted method

Abstract

The vertical ZnO nanorod array was grown as the piezoelectric pressure sensors. By taking advantages of the induced conductivity of the ZnO nanorod array under light illumination, the nanostructured-ZnO pressure sensors exhibited the improved sensitivity of 7.89 μA ⋅ cm2/mN compared to 0.027 μA ⋅ cm2/mN of the ones without light illumination. Moreover, the sensing current of the nanostructured-ZnO pressure sensors depended on the ultraviolet wavelength and power density. Consequently, the sensors could be applied as versatile function of pressure sensors, light wavelength sensors, and light power density sensors.