Versatile fully reflective three by three beam splitter for high throughput surface texturing with high power femtosecond laser (Conference Presentation)

Gusachenko, Ivan; Patars, Jérôme; Pallier, Gwenn; Henrottin, Anne; Bruneel, David; Jian, Pu; Pinel, Olivier; Ramos-de-Campos, José A.; Labroille, Guillaume

doi:10.1117/12.2546194

Cited by 1 publication

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“…A fully reflective 3x3 beam splitter compatible with high power up to 300 W from a 500 fs-pulse laser is presented in [69]. The process was validated in ablating craters with multiple Gaussian beams with 15 μm diameter and 300 μm pitch.…”

Section: Multi-beam Systemsmentioning

confidence: 99%

Ultra-Short Pulse Lasers for Microfabrication: A Review

Račiukaitis

2021

IEEE J. Select. Topics Quantum Electron.

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Ultra-short pulse lasers, generating coherent light pulses with pulse durations in the picosecond and femtosecond range, are becoming popular in precision laser microfabrication. They are benefiting not only from well-predicted laser ablation with the suppressed heat-affected zone but also by opening new processing opportunities, especially in transparent materials, due to enhanced non-linear interaction with the material. In this review, the evolution of various kinds of mode-locked lasers from a scientific toy to a robust industrial tool is reviewed. The utilization benefits of high-average-power, high-pulse-repetition-rate ultra-short pulse laser are closely related to beam shaping and manipulation techniques. Fast beam scanning with galvanometric and polygon scanners as well as multi-beam parallel processing methods were developed. Some hot applications areas are briefly described. The efficient use of photons from ultra-short pulse lasers pushed the development of optimization methods in the ablation process. Efforts toward upscaling the process by increasing the average power of mode-locked lasers made feedback to laser developers, and burst regime became a necessity as well as high-speed beam scanning devices. Unique opportunities of ultra-short pulses are successfully exploited in machining transparent materials, with glass separation being the leading application.

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Section: Multi-beam Systemsmentioning

confidence: 99%

Ultra-Short Pulse Lasers for Microfabrication: A Review

Račiukaitis

2021

IEEE J. Select. Topics Quantum Electron.

View full text Add to dashboard Cite

show abstract

Versatile fully reflective three by three beam splitter for high throughput surface texturing with high power femtosecond laser (Conference Presentation)

Cited by 1 publication

References 0 publications

Ultra-Short Pulse Lasers for Microfabrication: A Review

Ultra-Short Pulse Lasers for Microfabrication: A Review

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