2010
DOI: 10.1111/j.1551-2916.2010.03902.x
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Versatile Crack‐Free Ceramic Micropatterns Made by a Modified Molding Technique

Abstract: Crack‐free ceramic micropatterns made of oxidic ceramic powders, e.g. alumina, titania, zirconia, and nonoxidic calciumphosphate ceramic powders were fabricated by a novel, simple, and low‐cost modified micromolding (m‐μM) technique via polydimethylsiloxane stamps. By means of this m‐μM technique it is possible to fabricate monolithic ceramic bodies with a micropatterned surface with very high accuracy on surface detail. Our produced micropatterns can feature various geometries, e.g. cylinders, holes, channels… Show more

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Cited by 15 publications
(14 citation statements)
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“…All experiments were carried out using double deionized water with a conductivity of 0.04 μS/cm obtained from a Synergy ® apparatus (Millipore, Darmstadt, Germany). The molding forms (PDMS, Sylgard ® 184 silicone elastomer, Dow Corning, Wiesbaden, Germany) were prepared as described in the literature …”
Section: Methodsmentioning
confidence: 99%
“…All experiments were carried out using double deionized water with a conductivity of 0.04 μS/cm obtained from a Synergy ® apparatus (Millipore, Darmstadt, Germany). The molding forms (PDMS, Sylgard ® 184 silicone elastomer, Dow Corning, Wiesbaden, Germany) were prepared as described in the literature …”
Section: Methodsmentioning
confidence: 99%
“…Planar alumina discs were fabricated using a modified micromoulding method described in Holthaus et al [23]. Alumina aqueous suspensions (solid content of 20 vol.%) were obtained by mixing 19.9 g particles with 20 ml ddH 2 O. Polyacrylic acid (1.2 vol.%) was used as binder.…”
Section: Alumina Discsmentioning
confidence: 99%
“…The effect of air diffusion on the fidelity of soft lithographic micromolding remains unknown. For the micromolding liquid, colloidal suspensions of nanoparticles are preferred to increase the solids loading, desirably to as high as 40 vol% . Electrostatic stabilization by adjusting the surface charge of the nanoparticles and steric stabilization by adsorbing polymer dispersants on nanoparticle surfaces can be utilized to overcome nanoparticle agglomeration and high suspension viscosity .…”
Section: Introductionmentioning
confidence: 99%
“…[6][7][8][9] Soft lithography offers a novel and effective approach to create ceramic patterns with micro-to nanostructures. [10][11][12][13][14][15][16][17][18][19][20][21][22] Microelectromechanical systems (MEMS) based on ceramic materials have been successfully achieved by soft lithography. [14][15][16][17] For example, complicated borosilicon carbonitride (SiBNC) MEMS devices with 20-100 lm dimensions have been obtained by microtransfer molding 14 ; the structural integrity of MEMS Al 2 O 3 ceramics has been further enhanced by centrifugally aided micromolding 15 ; parallel SiCN microlines several millimeters in length have been created by micromolding in capillaries with ceramic precursors.…”
Section: Introductionmentioning
confidence: 99%
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