Verification of nano-particle absolute height position measurement from a surface with invisible reference tilt resin by multi-wavelength evanescent fields

GOTO, Daiki; KHAJORNRUNGRUANG, Panart; BLATTLER, Aran; TERAYAMA, Yutaka; OHTA, Yuki

doi:10.1299/jamdsm.2024jamdsm0049

JAMDSM

2024

DOI: 10.1299/jamdsm.2024jamdsm0049

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Verification of nano-particle absolute height position measurement from a surface with invisible reference tilt resin by multi-wavelength evanescent fields

Daiki GOTO,

Panart KHAJORNRUNGRUANG,

Aran BLATTLER

et al.

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Verification of nano-particle absolute height position measurement from a surface with invisible reference tilt resin by multi-wavelength evanescent fields

Cited by 0 publications

References 9 publications

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