“…Up to now, the proposed theoretical models of the nanostructure production by slow single HCI, including Coulomb explosion [19,20,21], molecular dynamics simulations [22,23], inelastic thermal spike model [24,25], and plasma model [26,27] describe the mechanism only in a qualitative manner and agree quantitatively only with the results of selected experiments, mainly for insulators. For the metallic surface modifications, the micro-staircase model of the HCI neutralization accompanied by the charge dependent model of the kinetic energy loss has been proposed [28,12].…”