Abstract:Micro-Raman analyses were carried out to investigate the micro-structure of cross section for diamond films prepared by hot-filament chemical vapor deposition.The variation of Raman peak feature with position was recognized as the difference of micro-structure in the film.The presence of broad band and high background intensity near the substrate surface was attributed to the amorphous carbon synthesized in the nucleation process of diamond film.The reduction of sp3-bond structure in the amorphous carbon phase… Show more
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