Variation of color in Zirconium nitride thin films prepared at high Ar flow rates with reactive dc magnetron sputtering

The effect of deposition conditions on the properties of Zr-carbide, Zr-nitride and Zr-carbonitride coatings – a review

“…82,146 Nitrogen rich ZrN x coatings exhibit dark yellow, brownish yellow, dark brown and finally semi-transparent at N/ Zr ratios of 1.2 to 1.3. 146 In another study using DC magnetron sputtering deposition, 79 the color of the coatings changed from silver to dark brown, then to green-yellow and finally to blue with increasing nitrogen flow rate. The golden color was not observed under the experimental conditions used in this study.…”

“…In another study using a DC magnetron sputtering technique, 79 upon increasing the nitrogen flow rate from zero to 6.0 sccm (the argon rate was fixed at 6 sccm), the phase constitution of the coatings changed from a-Zr, a-ZrN 0.28 , ZrN, and Zr 3 N 4 and finally to an amorphous phase. In another investigation using DC magnetron deposition, single-phase fcc-ZrN was observed at a nitrogen flow rate of up to 1 sccm.…”

Microstructure, properties and applications of Zr-carbide, Zr-nitride and Zr-carbonitride coatings: a review

“…24,25,26,27,28 Erosion behavior of ZrN coatings was studied in 1988 29 and 1990. 30 Various studies were conducted on ZrN coatings in the following decades to evaluate their various properties such as tribology, 31,32,33,34,35,36,37,38 erosion, 39,40,41 adhesion, 31 structure, composition, corrosion and oxidation, 42,43,44,45 nuclear fuel element compatibility, 46,47,48 color of coatings, 49 influence of synthesis parameters, 50,51,52,53 bio-and cyto-compatibility of human body implants, 54,55,56,57,58,59,60 optical, electrical and electronic properties, 61,62,63,64,65 and modeling and computational analysis. 66,67,68 Various investigations on Zr-carbonitride coatings have been undertaken to study synthesis parameters, 69<...>…”

Carbides and Nitrides of Zirconium and Hafnium

“…Zirconium and hafnium nitrides are also attractive hard coatings for decorative and architectural glass applications [11]. They have golden-green and yellow-green colors, which can be fine-tuned by nitride stoichiometry and by alloying with Ti and Al nitrides and carbides [12]. Zirconium nitride coated tools and scalpel blades are commercially available and are considered to be superior for Al cutting applications and have high biocompatibility.…”