Variable-spot ion beam figuring

Wu, Lixiang; Qiu, Keqiang; Fu, Shaojun

doi:10.1016/j.nimb.2016.01.009

Cited by 6 publications

(2 citation statements)

References 21 publications

(23 reference statements)

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“…Ion beam figuring (IBF) is an established method in high-end surface manufacturing of fused silica, silicon, silicon carbide and low expansion glasses [7][8][9][10][11][12]. Advanced IBF techniques [13][14][15][16] and IBF machine optimization proposals [17] are under consideration. However, the direct machining of standard aluminium alloys (e.g.…”

Section: Introductionmentioning

confidence: 99%

Reactive ion beam figuring of optical aluminium surfaces

Bauer

Frost

Arnold

2017

J. Phys. D: Appl. Phys.

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Ultra-smooth and arbitrarily shaped reflective optics are necessary for further progress in EUV/XUV lithography, x-ray and synchrotron technology. As one of the most important technological mirror optic materials, aluminium behaves in a rather difficult way in ultraprecision machining with such standard techniques as diamond-turning and subsequent ion beam figuring (IBF). In particular, in the latter, a strong surface roughening is obtained. Hence, up to now it has not been possible to attain the surface qualities required for UV or just visible spectral range applications. To overcome the limitations mainly caused by the aluminium alloy structural and compositional conditions, a reactive ion beam machining process using oxygen process gas is evaluated. To clarify the principle differences in the effect of oxygen gas contrary to oxygen ions on aluminium surface machining, we firstly focus on chemicalassisted ion beam etching (CAIBE) and reactive ion beam etching (RIBE) experiments in a phenomenological manner. Then, the optimum process route will be explored within a more quantitative analysis applying the concept of power spectral density (PSD) for a sophisticated treatment of the surface topography. Eventually, the surface composition is examined by means of dynamic secondary ion mass spectrometry (SIMS) suggesting a characteristic model scheme for the chemical modification of the aluminium surface during oxygen ion beam machining. Monte Carlo simulations were applied to achieve a more detailed process conception.

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Section: Introductionmentioning

confidence: 99%

Reactive ion beam figuring of optical aluminium surfaces

Bauer

Frost

Arnold

2017

J. Phys. D: Appl. Phys.

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“…A set of decomposed wave surfaces linearly build up a superposed surface approximating to the desired surface. Moreover, we have compared two approach in our previous work [16] to calculate the dwell time distribution in corresponding with a sinusoidal profile.…”

Section: Optical Fabrication With Linear Ion Sourcementioning

confidence: 99%

Surface modeling for optical fabrication with linear ion source

Wu,

Wei,

Shao

2016

Preprint

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We present a concept of surface decomposition extended from double Fourier series to nonnegative sinusoidal wave surfaces, on the basis of which linear ion sources apply to the ultra-precision fabrication of complex surfaces and diffractive optics. It is the first time that we have a surface descriptor for building a relationship between the fabrication process of optical surfaces and the surface characterization based on PSD analysis, which akin to Zernike polynomials used for mapping the relationship between surface errors and Seidel aberrations. Also, we demonstrate that the one-dimensional scanning of linear ion source is applicable to the removal of surface errors caused by small-tool polishing in raster scan mode as well as the fabrication of beam sampling grating of high diffractive uniformity without a post-processing procedure. The simulation results show that, in theory, optical fabrication with linear ion source is feasible and even of higher output efficiency compared with the conventional approach.

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Thin Films

Colligon¹,

Vishnyakov²

2020

Surface and Interface Science

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Variable-spot ion beam figuring

Cited by 6 publications

References 21 publications

Reactive ion beam figuring of optical aluminium surfaces

Reactive ion beam figuring of optical aluminium surfaces

Surface modeling for optical fabrication with linear ion source

Thin Films

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