Vapour-phase deposition of oriented copper dicarboxylate metal–organic framework thin films

Abstract

Vapour-phase deposition of copper dicarboxylate metal–organic framework thin films with an out-of-plane orientation and accessible porosity.

Current Progress and Future Directions in Gas‐Phase Metal‐Organic Framework Thin‐Film Growth

“…This CVD technique was also applied to synthesize ZIF-8 membranes based on a zinc acetate gel coated hollow fiber [15] and Co 2 (bim) 4 (bim: benzimidazole) ZIF membranes using a Co-based gel coated porous ceramic tube. [16] However, in these two cases, metal precursors were prepared in a gel-phase, which involved the use of solvents. In addition to the CVD technique, an ALD (or molecular layer deposition, MLD) technique was exclusively used for the sequential deposition of metal cations and organic ligands in a layer-by-layer (LBL) bottom-up growth approach, which was applied to MOF-5 [17] and UiO-66 [18,19] thin film deposition.…”

“…developed a gas‐phase ZIF‐8 thin film growth method by depositing 2‐methylimidazole (2‐mIm) molecules using chemical vapor deposition (CVD) on ZnO layers grown by atomic layer deposition (ALD), a top‐down approach. This CVD technique was also applied to synthesize ZIF‐8 membranes based on a zinc acetate gel coated hollow fiber and Co 2 (bim) 4 (bim: benzimidazole) ZIF membranes using a Co‐based gel coated porous ceramic tube . However, in these two cases, metal precursors were prepared in a gel‐phase, which involved the use of solvents.…”

Solvent‐Free Powder Synthesis and Thin Film Chemical Vapor Deposition of a Zinc Bipyridyl‐Triazolate Framework

“…For example, MOF chemical vapor deposition (MOF‐CVD) was inspired by OSFR chemistry . The MOF‐CVD approach relies on two steps: vapor‐phase deposition of an oxide precursor followed by its reaction with the vaporized linker , . Recently, we developed CVD protocols for the microporous zinc 2‐methylimidazolate {[Zn(mIm) 2 ]} MAF‐4 (also known as ZIF‐8) and mesoporous zinc 2‐ethylimidazolate {[Zn(eIm) 2 ]} MAF‐6 , .…”

Solvent-Free Powder Synthesis and Thin Film Chemical Vapour Deposition of a Zinc Bipyridyl-Triazolate Framework

“…For example, Yaghi and co-workers prepared zeolitic imidazolate frameworks (ZIFs), a subclass of MOFs, using metal salts and various imidazole linkers in solution. [8,9] The deposition of new materials as thin films, a prerequisite for their introduction in several applications (e.g., microelectronics), [10] is often achieved through adaptation of powder preparation routes. [4,5] Later, a more sustainable preparation method was demonstrated, based on solvent-free reactions in mixtures of metal oxide and linker (OSFR).…”

“…[6,7] Interestingly, different polymorphs can be obtained depending on the synthesis conditions, and a number of MOF materials have only been synthesized under solventfree conditions. [9,[12][13][14] Recently, we developed CVD protocols for the ZnO powder and layers, respectively. [11] For example, MOF chemical vapor deposition (MOF-CVD) was inspired by OSFR chemistry.…”