Vapor pressure of metal organic precursors

Vapour pressure of diethyl phthalate

“…The estimated uncertainty in pressure was ±2% of the measured pressure value over the range 0.1 Pa to 100 Pa, and ±1.5% over the range 100 Pa to 1.3 kPa. A modified version of the original static apparatus is described in detail by Fulem et al [17].…”

Vapour pressure and heat capacities of metal organic precursors, Y(thd)3 and Zr(thd)4

“…The static apparatus described in Fulem et al [2] was redesigned to avoid leaks occurring when temperature of the thermostatted box is subject to periodical changes from room temperature to 473 K. The schematic drawing of the apparatus used is shown in Fig. 1.…”

Vapor pressures of dimethylcadmium, trimethylbismuth, and tris(dimethylamino)antimony

“…We note that the producers of metalorganic precursors use in their catalogs almost exclusively the vapor pressure equations taken from Bamford et al [28] despite already shown significant discrepancies of these values [1].…”

“…Therefore, in 2003 we launched a long-term research project aiming at systematic and accurate vapor pressure measurements of metalorganic precursors used for epitaxial techniques. Since then, a series of increasingly improved vapor pressure apparatuses capable of measuring reactive and toxic materials have been constructed in our laboratory [1][2][3][4] and the vapor pressures of the precursors of Ga, Al, Sb, Zn, Si, In, Y, Zr, Ge, and Hf have been determined [1,3,[5][6][7][8][9][10][11]. A recent compendium covering phase transition enthalpy measurements of organic and organometallic compounds [12] gives a comprehensive overview of the literature sources reporting vapor pressures of metalorganic precursors in the period 1880-2010 and we recommend to consult it first when looking for vapor pressure data for these materials.…”