2011
DOI: 10.1021/ac200779d
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Vapor Detection Performance of Vertically Aligned, Ordered Arrays of Silicon Nanowires with a Porous Electrode

Abstract: A schematic of the sample chamber and vapor delivery system built in-house. A zero air generator, humidifier, and three mass flow controllers (MFCs) are used to generate the carrier gas and various analyte gas mixtures. The white arrows inside the sample chamber indicate the gas flow impacting onto the sensor. The sample chamber can also be heated for temperature studies.

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Cited by 28 publications
(21 citation statements)
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“…To evaluate the chem/biosensing capabilities of our PTE SiNW array sensors, the completed devices were exposed to varying levels of NO 2 or NH 3 in a custom-built testing chamber. The specifics of the testing chamber and conditions have been described elsewhere [22]. Without further treatment or modification of silicon, surface adsorption of electronwithdrawing (donating) species like NO 2 (NH 3 ) decreases (increases) the overall resistance of our p-type Si devices.…”
Section: Resultsmentioning
confidence: 99%
“…To evaluate the chem/biosensing capabilities of our PTE SiNW array sensors, the completed devices were exposed to varying levels of NO 2 or NH 3 in a custom-built testing chamber. The specifics of the testing chamber and conditions have been described elsewhere [22]. Without further treatment or modification of silicon, surface adsorption of electronwithdrawing (donating) species like NO 2 (NH 3 ) decreases (increases) the overall resistance of our p-type Si devices.…”
Section: Resultsmentioning
confidence: 99%
“…Graphene or reduced graphene oxide (rGO) with high charge carrier mobility, atomically thin nature and abundant adsorption sites, makes the semiconductor/graphene Schottky heterojunction (Barristor) ultrasensitive for gas sensing . Vertical silicon nanowires (SiNWs) array offers distinct merits in terms of the capability for surface functionalization and the sufficient gaps for molecules diffusion, and SiNWs array‐based sensor has been considered an ideal platform for gas sensing due to the higher signal‐to‐noise ratios and faster response . The electron affinity of TiO 2 (4.0 eV) is only a bit smaller than that of silicon (4.05 eV); thus the insertion of TiO 2 into Si/rGO should be an ideal choice to support the above assertion.…”
Section: Introductionmentioning
confidence: 99%
“…Notably, nanowire-based gas sensors exhibit high sensitivity, short response times, and high stability; in addition, they are lightweight and can operate at lower temperatures than sensors fabricated from their bulk counterparts [9]. Therefore, several nanowire-based gas sensors have been developed [10][11][12][13]. Stannic oxide (SnO 2 ) is one of the most important n-type semiconducting (E g ~ 3.6 eV) metal oxides [14] and has been used in gas sensors [15][16][17].…”
Section: Introductionmentioning
confidence: 99%
“…SnO 2 -Si heterojunction nanowires are promising materials for gas sensing applications. Si-based gas sensors [11] have currently received significant interest for gas sensing because of their…”
Section: Introductionmentioning
confidence: 99%